——?????????????????????

2017???????????????????????

??????????????????????????????????????Veeco???????8.15?????????????Ultratech????Э?飬??????Amkor Technology???????Nanium??δ??????????????Ultratech?????????????豸???г??????Veeco??ν???????????????????????г????λ???????????????????Amkor?????????????????棺????Amkor???????????Nanium?????????????????У?eWLB???????л??????10?????????????飬???Nanium??????Amkor????????????????????????????????????Nanium???????????????????????????????OSAT???????????????????????OSAT???????????????????????????????????

??????????????2016?????????????????????????????????????????豸??Veeco??????????????Amkor?????1????????????????????TSMC??GLOBALFOUNDRIES??????????????????????????????????????????????????????????????????????????????????????????

??????·?????????????InFO???????????????“????”

2009-2010???????????????????Fan-Out Wafer Level Packaging, FOWLP??????????????????????????????????Intel Mobile??????????????????????????????????????????÷?Χ?????????о????о??????????2011????г??????2012??????????/???Fabless?????????м?????????????????????????????

2013-2014????????????????????????????????????????????羧???о????????WLCSP????????????????????????2014???????????????????????????г?????????????????Ρ?

2016??TSMC???????????????????????????????Integrated Fan-Out, InFO????????????????iPhone 7????????A10???????????????TSMC????????????????????????????????????????????????ò???С??????????????“????”?????????

??????????????????

????????????????????

??????????????????????????????????Fan-in??????????Fan-out????????????WLP??????Fan-in???????????????????????IC????????IC?????????????????????????Ball Pitch??????????????????????·?壨PCB?????????IC????????????????????λ????????????????????????????????????????????????????????????????????????WLP????????????????????????????????????????????????????????????????????????????????????????????в?????????????????????????????????integrated fan out WLP????????InFO??????????????

???????2014??????InFO??????????????????????????RDL?????pitch????С????10???????????????????

?????InFO????????????250um??RDL???10um

?????InFO?????

InFO????????о??????????????磺8mm x 8mm?????????????????о???????15mm x 15mm???????????????????о????????????????25mm x 25mm??????δ????????????????о??????

InFO??????????????豸

?????о?????????У?FC-BGA???????InFO?????????????????????????С???????InFO???????????????????????????????????????γ???С??????????????????????????????????????1??????????????????????????InFO???·??????????

??InFO?????У???????γ?????PAD?????????????????????????????????????????к?????????????????????on-chip????????????????·??????????С??????????????????С??????????????3.3nH?????????65nm??CMOS????on-chip???????????????Q?12????InFO???????????42??????????????????????????С??Q??????????????????????????????????????

??в???on-chip??InFO???????????

????????????о?FC-BGA????????InFO??????????????????8mm x 8mm?????????5mm x 5mm?????о???2??2mm x 1.25mm??Со???????????25˚C???????2W???????????????????InFO???????????????????????????????InFO????????“?????”???????С???????磬?ж???о??????????????·??????????????InFO??????????????????о??????MCM?????14%????????28.0C/W???????32.5C/W???????????????9˚C????????

InFO WLP??FC BGA MCM????????

60GHz???????????????????????????????????????????????????????á????1???????????Low Temperature Co-fired Ceramic LTCC????PCB????????????????????????о?????о????????????????????г???????????????????????????????

?????????????InFO??????????糣???????????á?57~64GHz????????糣???4??????300um???????h2??????????MC???????????RDLs???????MC???????λ??MC?????????????????????890??W??um x 1020??L??um?????????λ??MC???????????????????????С?

????InFO?????????????????

?????????????????????о??????????????????14.5mW????????InFO????????11.7mW???????17%??????

????????????Ч??С????????????????????????????????????????·?????к??????????????????????????????????????Ч???С????C4??Controlled Collapse Chip Connection?????????о??????????????70%???к?73%??????????????????????????????BGA??LTCC????????????

InFO?????о???BGA????????????

??????????get???????????????????????н????????????????????μ???????????????5?·????????MEMS????????????γ???????????????????????????????????????

???????γ??

MEMS????????????γ?

?????????

????????????????г?????-2016?桷

?????????????????г?????-2016?桷

???????????????????????????????????????????????????????????????羧????????MEMS??????????????????????????????wangyi#memsconsulting.com??#????@????