???????????????EV?????????EVG????Leti??????????????300mm????????????????1µm????????????500nm??棨Cu Pad??????????EVG?MEMS????????????????г?????????????豸???????Leti???CEA Tech??????о?????

???????Leti??????н??У????EVG??????GEMINI FB XT?????????????????/?????????????????ù?????3D?????????·??IC????ó?????????????????????Leti????IRT Nanoelec?????????????????EVG??2016??2?????Leti??3D?????????

?????????3D???????????????

???????????????????????г????????????????????????????????????????????3D??????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????С????????????????????·?????????????????????淶?????????????????

?????

??Leti?????У????????300mm???????GEMINI FB XT???????????????????????????????EVG???SmartView NT????????????У????飬?????????????????λ??????IR alignment measurement?????????????195nm??3 sigma????Χ???????λ??????????????С??±15nm????300mm??????????????о????ú?湤??????????????????????м?????1µm??4µm???????????????????????????

???EVG??GEMINI® FB XT??????????????????300 mm?????Pad???1µm???????м??????FIB-SEM?μ??????????????????Leti??

Leti??????????????Frank Fournel???“???????????????С??1.5µm?????????????????о?????α??????????????????ζ???????????3Dо?????????????????????????????????????”

Leti????????????????????????????1 µm Pitch Direct Hybrid Bonding with with<300nm Wafer-to-wafer Overlay Accuracy????????2017??IEEE S3S????????????檔

EVG??????????????????????IP?????????Markus Wimplinger??????“???????CMOS?????????MEMS???????????3D?????????????????????????????????????????????3D?????о???????????????Leti?????????????????????????????????С?EVG???????????????????????????Leti??3D??????????3???з???????????á?”

GEMINI FB XT?????????????????EVG????????XT????????豸?????饗EFEM????????????????????????????????SmartView NT ???????????????У???????????????????????λ?????200nm???￡?3 sigma????????GEMINI FB XT????????6?????????????飬??????洦???????????????裬???羧?????????????弤????У?顢????????????????????????????????′??????????????

EVG??11??14??-17????1?????????????????е?SEMICON Europa????GEMINI FB XT??

?????????

??MEMS??????-2017?桷

??MEMS????г??????????????-2017?桷

???????????豸?г?-2017?桷

??3D??????TSV????2.5D?г??????????-2017?桷

??????????????-2017?桷

?????????????CMOS?????????IMX400??