?????????2016???????????MEMS???????Silex(???????)?????????????е??????????????????????MEMS??????????MEMS??????????????????????

???????2017???????????????2017???????????6.01????????????78.21%;??????4843.44???????????17.99%??????MEMS???????????????????????3.19????????????174.41%??????????31.53%??

??4??25??????????????????????????2017????????????MEMS????????3.2?????????53%???????????棬MEMS??????????45%??

???MEMS???????????????????????2017??4??~8?????????????????????о???????о???к??п?????????????MEMS????????????MEMS????????????????????8???MEMS????????ù???????·???????(?????)?????????

2016??11?￡???????????????????????“8???MEMS???????????????”????????????????????????е????????2023??????3???/?￡????????????????????????6????????30%???????14??????????????????????й???????????????衣

???????????2017?????г??2017????????????·?????????????????????10???????????????“8???MEMS???????????????”????衣

?????????????????????????????????MEMS???????????????????????????“8???MEMS???????????????”??

??????????????????“8???MEMS?????????”???????????裬?豸????????????????????У???????????????????????????????????????????????????Silex??????????????????????????????????????

?豸???棬????????豸????????????????????????????????????????????????￡????????????????????8??????????豸?????????????????????????????????????豸??????????????????????????????豸??

???????????棬??????????????????Silex????????????????????????????豸???????????????????????????????????????????Silex???????????λ???б?????????

??????????????????????????彨?????????????????????????????????????????δ??????????????????????????????????

??????棬????????????????????????????Silex????????????????????????????????????????????з???????Silex?????????????????????

Silex????????????弰?????????????????????????????????????????Silex??????????Χ??????????????????á??????????????DNA/RNA??????????????????楨???????????????????????????????2017????Silex??е????500????????????δ??к??/???????????2.77?????????2018??????????????????

????????????8???MEMS????????????????????????????6-12???￡????????????????2020????2021?????????????

??????????2018??????????MEMS??????г??????????????????????????????????MEMS???????????????????????????λ??

?????????

??MEMS??????-2017?桷

??MEMS????г??????????????-2017?桷