???????????????????????CMOS??MEMS???????????SilTerra????????????????????к???????????CMOS??????MEMS????????????piezoelectric micromachined ultrasound transducer, PMUT??????PMUT-on-CMOS?????????????????????????????????CMOS?????PMUT??PMUT???????????CMOS?????????????????????е??????????????????????SilTerra?κ????180 nm??130 nm?????????CMOS??BCD??RF???????????????????????PMUT??

??????????CMOS IP??PDK???????????????????????????PDK?????????PMUT???????????????г????????磺?????????е?20 MHz PMUT??????????????????5 MHz PMUT?????SilTerra??PMUT-on-CMOS???????????????????????

“????????????????????????????μ?????????ù????????????CMOS??????飬????????????????CMOS???????????????????????????????????????????????????????????????????????Ч????????????????????”SilTerra????????MEMS??????????Arjun Kumar Kantimahanti???

SilTerra?1??????????PMUT????

PMUT-on-CMOS?????????????????????CMOS?????????PMUT?????????25 MHz??г??????9??????????????????CMOSо??????????PMUT??

SilTerra????MEMS-on-CMOS???????MEMS?????????????????MEMSо??????????????????о???????????????????????????????????????ù????????????CMOS?豸??????MEMS-on-CMOS????????MEMS??????

SilTerra?1??????????PMUT???????????????

SilTerra?????CMOS??MEMS??????????????CMOS?????????????????????RF??BCD???????????????????90 nm???????MEMS????????????????????SilTerra?????????????????46000?8??羧??????????????塢???????й???????????

SilTerra??2001???????????????乤??λ???????????Kulim??????????????????????????????????????????????????′???

?????????

??MEMS??????-2018?桷

??????????????-2017?桷

??MEMS????г??????????????-2017?桷