????????????????????????????????????????г??????????????豸????????????????

???????????????????????и?????????????????????????Щ??????????????豸???????????豸??

???μ???????????????????????1µm???/???line/space??????????????????е????????????Щ?????磨critical dimension??CD??????????????????????????????????????1µm??????????????????????????????????????????????????????????????????

?????????????????????г??????????????????“????豸??????????????????????????????????????”???1?ASE????????????John Hunt?????“?????????????????????????????????????????????????????????г????????????????????”

??????Redistribution Layer??RDL????????????????????RDL????????????????????????γ??????????????Σ?????о???I/O?????????2????????????μ??????λ?????????????RDL????????line??????space???????????????????????????????????????????

?1????????

????????????????????????????????????????????8μm??line/space??8-8μm????RDL??ɡ??????????????ж??RDL??CD??8-8μm?????￡?????????????????????????????????5-5μm?????????????????1-1μm?????????????з??С?

“?????????????????????????и???????????????????????????????γ?硢????????????????????”Veeco????????????Warren Flack?????“???н?СCD???????????????????????е?????????????????????????????????????”

???????????????????????????????????п??????????????????????????????С??CD???????????????????????????????????????????????????????????????????????????????????

?????????棬??????????????????????????????????????????????????????????????????????У??м?????????裬???????——?????????γ?????????????????

?????????м??????????豸???????????????????????????????????????????stepper??????????????????????????????????????ò?????豸????????????????

?????????????

????????????????г????????????????????????У?????????????????????????????????????н??interposer)??????2.5D/3D??????????????

???????????????????????????о????/?泯?￡?chip-first/face-down????о????/?泯???chip-first/face-up????о??????chip-last?????????????RDL first????

??chip-first/face-down?????????У??????????????????о??????????????????????о??и??????о???????????о????????????????

EMC??epoxy mold compound???????????????????о??????????γ???ν??????????reconstituted wafer?????????????????????γ?RDL??

??RDL?????????У?????????????????????????y????????????????????ù???豸???????????????????????????????????У??γ??????RDL??

RDL??CD???????á???????????????????RDL??????????δ????5-5µm????????????????????????????????ASE??????1-1μm?????μ?RDL?????????????????磨TSMC???????????????????з?0.8μm??0.4μm?????????????????????????????????洢????high-bandwidth memory??HBM????????

“?????????к???????????????CD????С??????????????????????????С??”Veeco????????????????????Y.C. Wong?????“???????????RDL????5-5μm??????????????????????2-2μm??3-3μm??????????????1-1μm?????????з???????5G??????????????????洢??????????????????????????????????????????г???2-2μm??3-3μm?????μ????????”

????????????????????????????????????“???????????????????????warpage??/?????????wafer bow??????????о????????????????????о??????????о?????die shift????????????????????????”Yole?????Amandine Pizzagalli?????

?????????????????????????CD??????????????????CD??????????????????κ?????￡??????IC???????????е??????????????????????????????????????????????????????

????????????????檔????????????????????????RDL???????????????÷????????????????????????????з???????????????????????????????????????????????????????ж?????????СRDL?????о???

?????????Aligners??vs. ???????????steppers??

?????????????????????????????????????????á?????????????豸??????????????????????????????????????????????????????????豸?????????????bump?????????copper pillar????RDL???????TSV??????Щ??????????????

????Yole???????????2019?????????????豸?г??????????1.416???????????2018???1.287???????Pizzagalli??????е????豸????嵥?У??85%?漰??????????????????????????????????????15%??

????????????????????????????????????ù?????????濪????????????IC??????????????????????????????????????????檔

???????????????ν????????????????????????????????????????????????????豸?С????豸??????????????棬?????????γ??????

???????????????????????????????????豸??“????????????????????????????????????????????????????????????м???????????????????????????????????????????3μm line/space??”EV Group???????Thomas Uhrmann?????

????????????????????????MEMS??LED????????????????“??????????????к????3µm???μ?line/space??????????????У???????????????????????????磬????????????????????????????????????????????????????????????”Uhrmann?????

??????????????????????????????????????????????????????????????????????????????????????????????????????

????????????????????????С?????????????????????????????ù?????????????????ɡ????????????????????????????Canon?????????Rudolph??3??????Veeco????????????????????

???????????????????????????ò??????????????????“?????????о????????????????Щ??????????????????Щ??????????”Veeco?????Flack?????“??СCD??????????????????????????????????????????????С???????????CD???????????????????????????????”

???????????????о??????????193nm???????????????????????????????????????????????????????????????????豸?????????????????????????????436nm??g-line????405nm??h-line????365nm??i-line???????????

?????????У??Щ??????????????i-line???????????Щ?????????????????磬Veeco??????????????β?????????????????????????——436nm??405nm??365nm????????????ι????????????

?2??Veeco????????????????

?????????????CD???ò???????????????????“??i-line”???????????1-1μm????????Ρ????????豸?????“ghi”????????2-2μm?????????á?

???????????????????IC????У????????????????????????У?????豸?????????RDL??

??Щ??????????о??????????????????????о??????????????????????????????????????о????????????????

?????????????????????????и??????????????豸???????о?????“??????????????????????????????????????????????????????????????????????????????????????????????????о??????????????????????????????????????????????????????????????”Veeco??Flack???“???????????????????????о????????????Щ????￡???????????ú???о????????????”

о?????????????????????????????????????????????RDL????5-5μm??Χ?????RDL????????????????л?????????????????2-2μm??Χ???RDL????????С?

?????????????????1-1μm?????·????????????????????????????????????????????????RDL??

???????????????1-1μm??????????磬Veeco???????????????“??i-line”?????????????1-1μm??????????????п??????????numerical aperture??NA??????1X????塣

???????????????????Щ?????????Veeco??Imec???μ??????????????????RDL?????У????????????????????????衣????????????????????????????????????????н????????豸????????????????????仯??

??????Щ?????“??i-line”???????磬???????μ?i-line?豸???????0.24??????????????≤0.8μm??

“?????1µm?????????????????????????????????????????????????????????i-line??????С??????????i-line??????????С??1µm???????”????????????Doug Shelton?????“?????????????????ó????DNQ????????????????????Щ??????i-line??h-line??????У?????g-line????????С???????Щ??????С????????????????????????????????????????i/h-line????????????????????”

????????????????RDL???1µm???п??????????в??????????????????????????????????????????????????????????1-1μm???????Щ?????????豸??????????????????????RDL?????????????????

“??????1-1μm??????????????????????????????????????????????”Veeco?????Flack?????“???????????????С?????????????????????С??1μm??????????????????????????????????”

?????????????RDL?????????1-1μm??????????“??????????????????????????????????”Flack?????

???????????????о???????????????????????﹤???dual damascene????????????о???????????????????﹤???????????????????backend-of-the-line??BEOL????о??????????

?????????﹤???У?BEOL??????????????????????У?????????????????????????????????????????????乵???

??????????????????﹤??????е???????RDL????1-1μm???????“?????????????????м?????????????????Ч?????????”Flack???

????磨TSMC?????????????????﹤???????????????????????????????????????????????“??????”????????Ч???????

?????????????????

??????????laser direct imaging??????????????????????????????????????д?????????maskless????????????????????????????????о?????м????????????????????

?±??????Orbotech?????????Screen?????????????????????????????????????Deca???????????????????д??????

????????????????????е?о??????????????????????????????????????????о????????о????????????

“???????????????????о????????????о????????????????????о????????????????????????Χ???”Deca?????????Tim Olson?????

Deca?????“????????????Adaptive Patterning??”??????????о?????????????ASE??Deca????????????????????????????????M????????????

?3??M?????????????eWLB???????????

Deca???????????????????????——??????????塢??????顣??????з????и??????RDL??5-5μm????????????

????????????У?????о???????????????崠???У????????????С?28000??о???????о??????????????С??????￡??????о???????С???????2000???о???

????????ü?鼼????????????????о??????λ?á?Olson?????:“о????????????????????е???????????????????????????????????”

???RDL??о????/?泯?μ?????????????????????????????RDL??????????????е????о????????????????28???????????С?120??????

“?????????????????????????????????????е???????????????????????????б?????”Olson?????“??????????У????о????????????????????裬????о???‘X’???‘Y’???????????60μm????????????????????е???????????????97%????????????2μm???μ???Ч?????????????????????е?????????????????????????2μm?????????罫??С?0.8μm??”

ASE?????2019???2020?????????Deca?????????????????弶??????????????÷????????????????????????

???????Suss MicroTec????????????????????????laser ablation????????????????Suss??????????????????????????????????????????????????3μm??line/space????2-2μm??????С?

“?????????????????????????UV??????????????????????????????????????308nm??248nm??193nm??”Suss????????ü??????Markus Arendt?????“??????????佫????????????????????л????????????????????????????????????????????????????????????????????????????????”

??????ü?????Suss????????????????????????з??????????﹤??RDL???????????????

“???????·?????????????????”Arendt???“???????????????????????????1???μ?????????NA???????????????????2μm??line/space????2???????汾???????????????????????????????????????????????”

?????Brewer Science????????о??????????????????????????????????????????????????????о????????“????????????????????”Brewer?????????????Rama Puligadda?????“??????γ???壬???????????ù?????????”

???????????????1?????????????????????????1-1μm??????????????????????????????????????????????????????????Щ????????????????μ??????

?????????

????????????????г?????-2019?桷

??????????????-2018?桷

???弶?????PLP?????????г?????-2018?桷

??????????豸?????-2017?桷

????????????????г?????-2017?桷

??iPhone X??A11?????????????????InFO?????

????????

??MEMS???????????γ??????3??29????31???????????У????γ?????MEMS?????????????????MEMS?????????????????1??MEMS?????????2??????MEMS???????????????MEMS???硢???????????????????????????MEMS???????ī???????????3??MEMS???????????4??MEMS????????????????????????????????????????????MEMS??????????5??????????豸??????????????MEMS??????ò????????????????????????????

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E-mail??Guolei@memsconsulting.com