??????????????????Silicon Sensing Systems??????????????????MEMS???????????????????????????????????MEMS??????????????PZT?????????????MEMS?????????????????3?????????3000?????????????????????????????????????г??????????δ??????????????????屶????????PZT???MEMS?????г?????????????????????Silicon Sensing Systems???????????8?羧????????????

??????????????????????????????????????????????豸???????????????Silicon Sensing Systems?????MEMS????20?????ù???????Χ???????????????3000????

Silicon Sensing Systems?????????Eric Whitley???????“Silicon Sensing Systems????????????MEMS???????????????????????????????????????????????????Щ????????????MEMS???????????PZT????????????3???????????????????г????????????????????????????Ч???????MEMS???????????????????????????????????????????????????????”

Silicon Sensing Systems???????????Hiroshi Tanaka???????????????????У??????????“????Silicon Sensing Systems???????????е????????????????????????2020???????г????????????????μ??????????С????????????????????????????????豸???????μ?ALD????????????豸?????豸??????????????????????μ?PZT?????”

???PZT MEMS

Silicon Sensing Systems??2010??????????PZT???MEMS?????????????PinPoint®????????????????PinPoint®??????????????????1000?????????????????????????????????????г???????????3??0 ppm???????????????????????MEMS????????PinPoint®??????????????????????????????????????????

????PinPoint®???????Silicon Sensing Systems??????????似???????????????Silicon Sensing Systems?????????????MEMS???????????PZT??????????????ī??????????????????????????e????У?Silicon Sensing Systems??????????????????????????????????????????????????á?????????????????????

????Silicon Sensing Systems???

???Silicon Sensing Systems??????????1??????????????????????????????????????Collins Aerospace??Sumitomo Precision Products???????????????ù????????1999????г???????????????MEMS?????????????????????????????????????????????????4000???MEMS??????????????????????????????????ESC????????????GPS???????????????????????

?????????

??MEMS??????-2018?桷

???????????г?????-2017?桷

?????????????????????????????м?????

?????????????????-2019?桷

??????????г?-2017?桷

?????MEMS????????????-2017?桷