??????????????????????????????????Silesian University of Technology????Tomasz Blachowicz??1???????????????????Bielefeld University of Applied Sciences????Andrea Ehrmann??????Micromachines????????????о?????????“3D Printed MEMS Technology—Recent Developments and Applications”?????????????https://doi.org/10.3390/mi11040434??

??????е????MEMS???????????????????????????????????????????????????????????????????У???????????????????MEMS????????????????????????????????????????????t????????MEMS????????????????????MEMS?????У??????????????????????????MEMS???硢??ī???????

????????????????MEMS???????????????????????????μ??????????????????MEMS??????3D??????????????Щ?????и?????????????????????????????????“??????”???о????????MEMS 3D????????????????????????????????????????????????3D????????????——?????????Ч?????????????Ч?檔3D???????t??????????-?????-???????ABS?????????PLA?????????t???????????????????????

“????3D????MEMS?????????????????????????????????1%??3D???????о???????MEMS???????”?о?????????“????MEMS??????3D?????????????????γ????????????????3D?????????????????????????δ????????μ?3D??????????????”

“????????3D???????????????????????3D?????????????????????????????????????????”

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Blachowicz??Ehrmann???????н?????2013??Leary?????????????????о???3D??????????????MEMS??????о??????????Lifton?????????????????о???????????3D?????????????????????MEMS??????????????????????????????????????????????о??????????????????????????????????????????????????ī3D???????????????????????????????????

??3D???????????ù????????????????????????????????3D MEMS??????????????????????????

3D????????MEMS?????????????

3D???????????????????????????????緋???????????????????????????????????

??a????3D?????MEMS?????????????????????繅?????????????????????????????繅?????????????????b????3D??????????衣???????????????????

????????????У??о?????????MEMS??絯???????????dielectric elastomer actuators????3D???????????????????MEMS??絯?????????????????????????и???????????????????????????????????????????????÷?????????????

?????????????????????MEMS??????3D??????????????

Khandekar???????о????????????︴????????????????????3D?????????????

“???20???????γ?????3D???MEMS??????????????????Щ????????????????????????????????????ЩMEMS???????????????????????????????3D?????????????”?о???????????????

“????????????????????????????????????С??1 µm????С??????????????????????3D???????????????????????С??С???????????·??????3D???????????MEMS????????”

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??3D?????????·???????-2019?桷

?????????IME?????????г?-2019?桷

??????????????????л?????-2019?桷

??????????????????????г?-2020?桷??