??????????????????λ???????????MEMS??CMOS??????SilTerra??????????????????MEMS????豸?????????Evatec????????豸??CLUSTERLINE 200 II??????????????????????MEMS??????

Evatec????????豸??CLUSTERLINE 200 II

SilTerra???????????Evatec??????????????????2017????????????SilTerra??????????MEMS-on-CMOS?????????о????????????????

????????????Evatec?豸??2020??5????????SilTerra??MEMS??????????????????????MEMS????????籡?????????Щ????????SilTerra????????е??????????????PMUT?????????沨??SAW??г??????????????BAW??г????????????????????

SilTerra????Evatec????????豸??????????MEMS????

“????????????????????AlN??????????????ScAlN????????????????MEMS??????????Evatec?豸???????????????8??羧????????????????????????????????????????MEMS??????????????????????????”SilTerra??MEMS???????????????????Arjun Kumar Kantimahanti?????

“????????????SilTerra??????????????????顣?????????????????????SilTerra??????????????MEMS?????????”Evatec???????????Silvan Wuethrich?????

SilTerra???MEMS?????????????MEMS-on-CMOS????????С?MEMS-on-CMOS?????MEMS??????????????г??Ч????о?????????????????????????????????????????????????е?????????á?MEMS-on-CMOS???????SilTerra????“??????”????????????

??????????CMOS?????????MEMS????????BCD?????????????GaN?????????“??????”??????SilTerra????????λ?????????MEMS??CMOS??????????????????IC Insights???????????????????????У?SilTerraλ?е?17λ??????????????46000?8??羧????????????????????С??90nm??????????

Evatec?????з???????????????????????MEMS????????????????????????????豸??Evatec????????MEMS???????????豸????????Щ???????????????????AlN??AlScN?????????????豸????????