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2022-02-18 11:31:11 ???????????? ?????0 ?????
?????????????????????1?????????輼???о?????Fraunhofer Institute for Silicon Technology??ISIT????????PICOSUN® P-300B ALD????????PowderMEMS????????
PICOSUN® P-300B ALD??
Fraunhofer ISIT??PowderMEMS????????з???????????????????????????????д????????????ü???????????????????ALD???????????н????????????????????????????????????PowderMEMS????????????????????????????????????????????????????????????????????????????????н??й???????
“PowderMEMS?????????????????MEMS????????MEMS???????MEMS???????????????????????????磬?????????????????????3D?????”Fraunhofer ISITС?鵂????Björn Gojdka????????
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“????????????????????????????????ж??????б??θ????????Picosun??ALD????????????????????????????о?????ü????????????????????ALD?????????????????????????????????????е????????”Fraunhofer ISIT????????Thomas Lisec????????
Picosun??????????Christoph Hossbach????????“???????????????????????????????л???е????????Fraunhofer ISIT??PowderMEMS??????????????????????????????????????????????Fraunhofer ISIT???????к?????”??
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