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Polaris????????????MEMS???????????????
2022-03-08 22:29:12   ????????????   ?????0   ?????

olaris???????????裨SOI???????????MEMS?????????25~150???????????????Polaris?????????MEMS????????????1?????

- ??GE??????????Polaris????????MEMS????????????????????

- IntelliSense????????????????????????????Polaris?????????MEMS?????????????

- GE Research??Polaris??????????????GPS??MEMS??????????????

????????????????????MEMS??????????????????GE Research???????MEMS???????????IntelliSense??????????GE Research?????“Polaris”??MEMS????????????????????????????????????ù???????????????????????????????????MEMS???????????

GE Research???????в?????????????????Todd Miller?????“?????????Polaris??????????????????MEMS??????????????????????????????????????????????IntelliSense??????IntelliSense????????????????????????????????????MEMS?????????”

Todd Miller?????Polaris????“???-????-????”????????????????????Ρ??????“??λ?μ??????????????????????????????IntelliSense????Polaris???????Polaris????????????????????????????????????????????????????????????????·??????”

????GE Research??Polaris?????????MEMS????????????

????GE Research??Polaris?????????MEMS????????????

Polaris????6???????12????????????MEMS?????????????????????????????30:1????????????ù?????TSV???????????????Polaris???????????裨SOI???????????MEMS?????????25~150???????????????Polaris?????????MEMS????????????1?????

IntelliSense?????ú????????Sripadaraja?????????????????IntelliSuite????GE Research??Polaris??????????????????湤??????????????????DRC?????????飩??PDK????????????????????????????MEMS????????????“??????MEMS???????IntelliSuite”????????????????ж??????????MEMS?????????????????????????ж????????????????檔????????????????????????????????????????????????????????????????????????????????????檔

????GE Research

GE Research??????????GE??????????棬???????о??????????ɡ?GE Research????????????????????????????缶??????????????????г???????????????????????????????????????????????o?????????????λ????????????о?????????28000???????100????ISO 9001???????????????????????з???С?????????????????????????????????????

????IntelliSense

IntelliSense???????????????λ???????????????????????25???????????????IntelliSuite®?????д???CAD??????????MEMS?????IntelliSuite????????????????????????MEMS????????????????楨FEA?????????????????楨??????????IntelliSuite??????MEMS??????????????棬?MEMS???????????????????????????????

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???????????????????????????????-2021?桷??

????????????MEMS ?????????

???????????????ALD?????????????PowderMEMS??????
??????EPFL????glass-in-glass?1???????????????????3D???