?????????????????????????綥?????彎?????????????IDM???????????豸???????OEM?????????????幫?????????幤????????????????????????????Pure Wafer????Noel Technologies??????????????λ??????????????????????????????????????????

Pure Wafer??????????辧????????????????????Lam Research Corporation?????????????????Noel Technologies????????????????豸?????????????????????????????????????????OEM?????????????????????MEMS?????﹤???????????????????????

??1996???????????Noel Technologies????????峧???з????????????????????????????????г???Noel Technologies?????????????幫???OEM?????????????????????????幤??????????????????й???????????????????????????????????????????????塢???﹤???MEMS?????????????????????????????豸???°??幤????????

Pure Wafer?????й?S.Mark Borowicz?????“26??????????????????????????????????????м????????????????????????????????????????????????????弰???﹤???з???????Щ???????????????????????????????????????????????????????????”

Noel Technologies???????????????????

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Noel Technologies????????????????н?????????????磬????12??硢8??硢6??硢4????2???????豸????????????????????????Noel Technologies???????е????????????5???????????250?????2?????????????10-12????????????????????衢???????????????????????????????????????????μ????????RIE??????????蹤???豸??

Noel Technologies?????????Brenda Hill??????“???????????????????????????????????????????????????????????????????????????????????????????Щ?????????????????SEMI???????????????????豸У?????????????????λ????????????????????”

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Noel Technologies??????1996?????λ??????????????????????Pure Wafer?????????μ???????????????????????????????綥???????????幫??????豸???????IDM??????????塢?????????MEMS???????????У?Noel Technologies????????е?????????????????????????Noel Technologies???????2?????12????????????????е??????????????????????????·???????????????????????????????????????????????????????????????????????????????10-12?????????衢??????????????????????????????塢?????????MEMS??????????á?

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