?????????????????????Sumitomo Precision Products??????????????????????????????????????????MEMS Infinity???????????????MEMS??????????е????á?MEMS Infinity?????150?????200????MEMS??????????????????????????????????????MEMS???????????????????????????

MEMS Infinityλ??????????У?Amagasaki??????????????????????20,000??????????????????????MEMS???????????????????????????????????MEMS Infinity?????????????????PZT???????MEMS??????????PZT????????????????????е??????????????????PZT????????????????????????????е????????????MUT????????????????????????

epi-PZT???

“??????????MEMS??????????????????????????”??????????????Masahiko Tanaka?????????”??20????90????????????????????????STS——?????????????????DRIE???豸????20????90????????????????????????????????????????MEMS????????????????????MEMS???????????MEMS Infinity????????????μ?MEMS?????????????????MEMS???????????????Щ???????????????????Fabless??????????????”

MEMS?????????????г???????????????2028??MEMS?г????????200???????????????????????????????????????г?????????г????MEMS Infinity??????Щ???????г???MEMS????????????????????????????????MEMS?????????????·????

????MEMS Infinity

MEMS Infinity?????????????MEMS????Χ???????????????????MEMS?????????????????????????????MEMS Infinity???20,000??????????????150?????200????MEMS?????????????а???PZT??????????豸???????????PZT??epi-PZT??????????豸??MEMS Infinity??t????????????????????ISO????????????????????

?????????

?????е???????????????????-2023?桷

??????????е????????????CMUT?????????????????-2022?桷

?????????е????????????PMUT?????????????????-2022?桷

??????MEMS????????????IMU??SMI240?????????

??????MEMS????????????IMU??SCHA634?????????

????????MEMS????????????IMU???????????-2022?桷??