?к????????ж???????????????????????????????о??????????????г???????к??????е???????????????????????????????

????????????????????????????????У??The American University in Cairo????????????Scientific Reports???????????“Silicon-based mid infrared on-chip gas sensor using Fano resonance of coupled plasmonic microcavities”?????????????????????????Sherif M. Sherif?????????Mohamed A. Swillam??

?????о?????????????????Fano????????к?????????????6.5 μm????????????6000 nm/RIU??????????0.45 dB???о???????????????н???in-line??????г????????????г???????????о?????Σ?stub??г????????????????????????resonance orders??????????о??????in-line??stub????г??????????????????????????????????????????1????????о?????Щ???г??????????????о????????????????о??????????????????????????????????“CH₂O??N₂O??????3.6 μm??4.46 μm?к???????????”?????????Fano???????????

?????о????????ò????裨Si????????к??????????Ч??????1???????3 μm?????????????????220 nm?????辧??????γ???100 nm???????????bus waveguide?????????в??????????????5 × 10²⁰ cm⁻³?????????????干??????3 μm????????к????????е?????????????о?????????????????????????FDE????????????ò???????????????????-?????-??????????????????????????2??????????о???????о?????4 μm - 10 μm???к?????????????????????????????????????3?????

?1 ????Fano??????????3D????

?2 ????????????Ч??????a???糡????????????????b???糡????|Ex|???????????

?3 ?????????????????????

Fano???????????????????????????????????????е?Fano?????о?????????????????in-lineг?????stubг????????????????????????4???????5.5 μm??6.5 μm?????????Fano????????????0.45 dB???5????????Fano???????г??????糡?????

?4 ??5.5 μm??6.5 μm?????????Fano????

?5 ????Fano???????г????糡????Ex???

??????????к??????к???????????“???”?????????????Щ???壬?о????????????????????μ???????????Fano?????????in-lineг?????????stub????????????????????????????????????????6?????CH₂O??N₂O?????3.6 μm??4.46 μm?????±??????????7??????????崫?????????????????8?????

?6 ?????????CH₂O??N₂O?????Fano??????????3D????

?7 ??a??CH₂O???b??N₂O???????????????

?8 CH₂O??N₂O????3.6 μm??4.46 μm?????μ?????

???????????????о???????????к??????崫????????????????????????????????γ????????????in-lineг?????stubг???????????????????????????干????????3 μm?????????к????ε??????????????о????????о??????????г???????????????Щг?????????????????????????????in-line??????????stub??????????????棬?????????Fano????????о????????????????????????FOM????????????????????

?????о?????????????????????????????????STDF??????????EKB???????????????????

?????????https://doi.org/10.1038/s41598-023-38926-9

?????????

??????????г???????-2022?桷

??MEMS??????????????????????????????-2023?桷

?????????崫????SGP40?????????