MEMS????????????е??????????????????????????????????????÷?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????Щ?????????У???????????????MEMS????????????裨Si???????????????????????????裨SiC???????????????????????????????MEMS??????????????

?????????????????????????????????????????University of Tours???????????о??????CNRS?????????????University of Bordeaux?????о???????????????????????????????????????????????????????????????裨3C-SiC???????????MEMS??????????????????????е????????????CMUT???????????????????????????????????????????????????????????м???о??????????????3C-SiC???????CMUT???·?????????????????????CMUT???????????????崫?????????????????о??????“Silicon-carbide-based MEMS for gas detection applications”???????Materials Science in Semiconductor Processing??????

???????????3C-SiC???????MEMS????

?????MEMS??????????????????????????????ù???????????????????????????????????Щ???????????????????????????????????????????η?????á???Щ?????????????????????????????MEMS?????????????????

?????????????????????????翹?????????????????????????MEMS??????????Ч???????????????????MEMS?????????????????????????????У?3C-SiC???????е?????????????MEMS??á?

????3C-SiC????????????????????????м???????о??????????????????N₂???в?????????????????????H₂????????????CO₂?????????????0.2%??0.25%??????3C-SiC???????????????????Щ??????????????????????δ????????????o????洢?????H₂й??????????????????H₂??????4% ~ 70%??????????????????????г?????????????????????У???????3C-SiC????????????????????

?1 ????3C-SiC????????????????????????в????????????

?2 ????3C-SiC???????????г?????????Χ????????仯??????????N₂?е?H₂???????N₂?е?CO₂??

???????????CMUT????

??3C-SiC????????????CMUT????????Χ????????????仯???????????????????о????????CMUT???????32 μm × 32 μm???????????8 MHz??????CMUT???????????????????????????????????????????????????8 MHz????????￡???1 MHz??Χ????????CMUT??????????????????????ToF????????

?3 ??a?????????25 μm?????????PCB??Ш?μ???3C-SiC??????????????????????????????b????PCB??Ш?μ???CMUT??????????

???CMUT???г???????????????????????3C-SiC??????????????????????????Χ?????????N₂?е?H₂??CO₂????????0.15%??0.30%????????????????????????????????????崫????????????????????????????????Ч???????????壬???????????????????????????????

?4 ???CMUT???????????????仯????Χ????????仯??????????N₂?е?H₂???????N₂?е?CO₂??

?о?????????????????????CMUT???????????????????????????????????????CMUT???з???????CMUT???н?????????????????????????????d????????????????????????????????????CMUT????????????d???????????????????????????廷???й??

?5 ???CMUT??????N₂??????3????????????????????1 MHz????￡?

?6 ???CMUT???д??N₂????вο??0-0??????????????廷???仯?????????????????????仯???

??????????????3C-SiC?????CMUT??δ???????????о??????У??о????????????3C-SiC???????CMUT???·????????????3C-SiCα???????????3C-SiC????ó??????????????????CMUT?????????????崫?????????????

?????????https://doi.org/10.1016/j.mssp.2023.107986

?????????

?????????崫???????????г?-2023?桷

?????????崫????SGP40?????????

?????????崫????SGP30?????????

?????е???????????????????-2023?桷

??????????е????????????CMUT?????????????????-2022?桷

?????????е????????????PMUT?????????????????-2022?桷