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2024-03-07 15:23:53   ????????????   ?????0   ?????

?1????????????????о?????Fraunhofer IPMS???????????????о??pH?????????в?????????伯?????????г?Ч???????ISFET???С?

????????pH??????????????г?Ч???????ISFET??

????????????????1????????????????о?????Fraunhofer IPMS???????????????о??pH?????????в?????????伯?????????г?Ч???????ISFET???С?

Fraunhofer IPMS???????????????в??ISFET????????????α?繅??????pH?1~13??Χ???????????pH???????

???????о???????????????????5 mm x 5 mm????С???< 20 µV/h???????????????ɡ?????????ж?????????????????

Fraunhofer IPMS????????????????????Olaf R. Hild???????????????????ISFET????????????????????????pH???????

??о???????棬???????????????????????????????????????????????????????VDS???????1 V??

Hild??????“?????Щ?????????????ISFET??????????????????????”

ISFET??pH??????????????

ISFET??pH??????????????

ISFET???????????????壨MOS????Ч????????????????????????????????????????????????ɡ??????е???????????????????????????????в???????????????????pH???????????α?繅??3 M KCl?е?Ag/AgCl?????-??????VGS?????????????????

?о?????????????????????????????????о??pH??????????????貧???α?繅?????????п??????????????????????????????????????и????

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?????????崫???????????г?-2023?桷

?????????崫????SGP40?????????

?????????崫????SGP30???????????

????????????pH?????? ??Ч??????

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??????MXene?????????????崫?????????и?????????????????????