???????????????????????????????????????????????????????????????O₃??????????????????????????????????????壬???ж??????????ζ??????????????????????????????????β?????????????????????????????????????????????????????

????????????????????????????????о?????????4??????????Sb??????ZnO????????????????????????????????????Sb/ZnO???????????????????????????MEMS????????????????Sb????????????????????????ZnO???崫????????Sb/ZnO?????????????????????????о??????“Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater”???????Sensors and Actuators Reports??????

Sb/ZnO?????????????????е?????????????????????????????????????????????????????Ч???Sb??????乹??????3??????????????????￡?Sb???????ZnO????????????????????????????????????????崫?????????????????о?????????????????????SEM?????????????????TEM????X?????????????XPS???????о???Sb??ZnO?????ò?????????

Sb/ZnO??XRD????

Sb/ZnO??SEM?????

????????????????壬?????в?Sb??ZnO?????????????????????????????Χ?????150°C?????250°C?????????????????50 ppb?????250 ppb???????е??????????У???????????????????￡?7 mM Sb????ZnO??????????????κ??????????????????????????200°C????????????1 ppm????￡?7 mM Sb????ZnO????????????????????????

???Sb????ZnO???崫????????????μ????????

?????????????崫?????У????崫?л????????????滯????????????????Sb????ZnO??????????????????Zn?????Sb????????????????????????淴???

???崫?л???

???????????????о?????????Sb????ZnO???????????????????????????????????????Sb??ZnO?????????????????50 ppb??250 ppb???????????2????????????????????????7 mM Sb????ZnO???崫???????????????????????????????200°C?????????????????????????????????????и???????Sb????ZnO????????????????????Zn?????Sb?????????????????????淴????????????????????????????о????????????????????????崫??????

?????????https://doi.org/10.1016/j.snr.2024.100191

?????????

?????????崫???????????г?-2023?桷

??MEMS??????????????????????????????-2023?桷

?????????崫????SGP40?????????

?????????崫????SGP30?????????