- ??First Sensor?????STARe?????????о??????????
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2024-06-23 07:15:07 ???????????? ?????0 ?????
??????????????о??????????????????????????綼???????????????Pd???????????PdNPs??????????Ч???????FET????????????????????????????????????????PdNPs??FET????????????????????????????????????????????????
?????????????????????????????????Uppsala University?????о???????????????????????????Ч??????????????崫????????????μ????????????????????PdNPs??FET?????????????????????????Ч?????????????о?????????????????崫?????????????1 ~ 1000 ppm??????????????????????????ppb??Χ???????????300 nW?????????????????????????Ч?????л????????????????????????????????о??????“Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles”???????Nature Communications??????
?????о??????????????????????????Ч?????????Ч?????????崫?м??????о????????CMOS????????????????????Ч???????SiNW FET????SiNW??????????????裨SiO₂???????????????????????????????????NAG??????NAG????PdNPs??????SiNW??????????????????????PdNPs??????????????????????????PdNPs?????????????赲????SiO₂???????????????е????????????????PdNPs???????????????????PdNPs?????????巴????????????????????????/??????????????PdNPs?????е??????????????????????PdNPs?е???????Ч????????巴???????????????????????????????????Ч????????
?1 SiNW-NAG FET???崫???????????????????????????????в???
?2 PdNPs?е???????Ч?
????????????SiNW-NAG FET???崫??????1 ~ 1000 ppm???????????????????????????£??????????1000 ppm?????????????仯???4.86 × 10⁶%????????3600%/ppm??????????LOD???4.4 ppb??????SiNW???????С????????????????300 nW???????о???????????SiNW-NAG FET?????????????????????????????????????????????????????????????????????????????????????????????Ч?????л??????????????????????
?3 SiNW-NAG FET???崫?????????????
?4 SiNW-NAG FET???崫??????????????ж???????????
?????о????????SiNW-NAG FET???崫??????????????????????????????????????磬?????????????????????????????????????????崫???????????????????????е?????????????????Щ???????????????????????????????????????????????????й????????????????????????????????????????????????????????????δ??????????SiNW-NAG FET???崫??????????????????????о??????????????????????PdNPs??????????????????????????????????????????????????С?
?????????https://doi.org/10.1038/s41467-024-49658-3
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