??????????NO₂????????????????????????????NOx?????????????????????????????в???????Ч???????????NO₂???????NO₂??????????????????????????????

????????????????????????????????????????о????????????????????????????????NO₂??????????????????????????????????NO??30?????????????6?????????????????????????????ò???Pt???????????????????????????????????????г????????????????λ????????????TiNx?????????????????????￡??????TiN???????????崫?л?????????????????????????????????????NO₂?????????????????????????????????????????????????崫?????????????????????????????????о??????“Titanium nitride sensor for selective NO₂ detection”???????Nature Communications??????

?????????У??о?????????????????°???????л?????MOF???????MIL-125(Ti)?????TiNx?????????TiNx???????????????????????????????????????????λ?????20%?????????????Pt???????????????????????????MOF??????TiN-600?????????600?棩????????????221.9 m/g???????????????????TiN-CM??90?????????????????TiN-600?????е???λ?????????γ?????????????????????????????

MOF????????и????????????????λ??TiNx

TiN-600??NO₂??????????????????????7.4???5.2??TiN-600????????50 ppb??50 ppm???Χ???NO₂??????????????????????0.12 μA/ppm????????LoD??????50 ppb??????????????????????EPA???趨?????????53 ppb????

TiNx?????????????????-???????????-????????

?????TiN-600???崫??????????????о?????????????6???μ?????????????????????????????????????????4.2%??????TiN-600?????????г?????????????

TiNx???????????????????????

TiN-600?е???λ???λ???????????????????????????????о?????????λ??????任????????FTIR?????????????EPR???????????NO₂???л????????NO₂→NO₂⁻→NO???????????

????TiNx??NO₂?????????崫?л?????λ????

?????????о???????????????TiNx?????崫???????????????????????MOF MIL-125???а??????????г??????????221.9 m²/g??????????λ??????TiN-600????????NO₂??????????????????50 ppm???????6.05 μA?????????????????壬?????NO??30?????????????????????????????????????????6???????????4.2%????С??????????????Pt???????????????????TiNx?緋????崫??????????Ч?檔?????λFTIR??EPR???о??????????????NO₂???л???????????????????????????崫?в??????????????緋????崫??????????????????????????????

????????https://www.nature.com/articles/s41467-024-55534-x

?????????

?????????崫???????????г?-2023?桷

??SGX Sensortech???MEMS??????????崫????MP7227?????????

??MEMS??????????????????????????????-2023?桷

?????????崫????SGP40?????????

?????????崫????SGP30?????????????