????Qualtre???????????????????????BAW??Bulk Acoustic Wave??MEMS???????????????“QGYR110HA/QGYR110HD”????????????????????2014??12?μ??????????ò??????ù????????????“HARPSS??High Aspect-Ratio Poly and Single crystalline Silicon??”?????????????“?????????MEMS???????????????????????????????????????γ???С”????????????????????????????????豸??????????????????????豸???

????BAW MEMS???????????????

?2???????????Χ????±200??/s??????±3000??/??????????????0.25mV/??/??????????0.008??/??/√Hz???????????14??/Hr??С???????????????0.04??/??/?檔QGYR110HA???????????????QGYR110HD???????????????????I2C/SPI?????????????????????????????+3V??????????4.5mA????????????γ???7 mm x 7 mm x 2.9 mm??32????LGA??????????Χ?-40??+85?檔???δ??????

????Qualtre????????????BAW MEMS?????????3????????????2014??6???????????????“QGYR330HA/QGYR330HD”??