??????MEMS????????????????????????????????????о??????????????????????????????????????????????INS????

?????????????????????????INS???й???????——?????????????????????????????????е?????????????????????????????????????????????????????????????t???????·??????y??????????????????????????????????????磩??MEMS??????????С?????????????????????????????????????????覲???褣???

????????????????Caltech????????о?????????????????????????????????????????????????Щ???????????????????????MEMS??????????????????????????????MEMS???????????????????й?????????????????????и?С??????????????????????????????????????????????——????????????????????????

??????????????????????????Nature Photonics?????????????????????????о??????μ????????????Earth rotation measured by chip-scale ring laser gyroscope????????????????????????????????????Ted & Ginger Jenkin????Kerry Vahala?????“20?????????о????????2??????????????о???????????t??????MEMS?????????????????????????????г??????????????顣”

?????й???????????????????????з??????????????????????????????Ч???Sagnac effect??????????????????????????????·?????????????????????????????1?????????????????沨????λ?????????????????????б?????

?1???????????????????????????????????????????

?????????????????1??EDFA??erbium-doped fiber amplifier?????????????????2??AOM??acoustic-optical modulator???????????????3??PM??phase modulator????λ??????????4??PD??photodetector??????????????5??FC??frequency counter??????????????6??TM??temperature monitor?????????????7??PI??proportional-integral servo???????????????????8??ESA??electrical spectrum analyzer???????????????9??RF??radio frequency?????????10??TEC??thermal electric cooler??????????????11??f₁??f₂????AOM1??AOM2?????????????12??f_PDH??Pound-Drever-Hall?????PDH????????λ?????????????????ESA????????????????????????????????????????????????

??÷????У???????н?·?????????????г??????????????????????????????????????????????????????SBL????????2??????????????????????????·?????????С??????磬????????????????????????????????Yu-Hung Lai???????????????????????“????”???????????·??Χ????????????????????????????Ч???????????????????

?2????????г???μ??????????????????????????????????г???????????????SBL????a????????ι????????fiber-taper waveguide???????????г?????????????????μ?????????????????N???????S????????SBL???????δν???????????????λ??????????????E????????W?????????λ?????b??????????????????????????????????λ???????????????δ?????????????????f??????Ω_E??????????????????c??????????m + N????????????????m?????????????????d????????????????????????????????????????Q???г???????????????????????????????SBL??????????????????????·??????????????????????????????????????????????????????????????·??

?????????????????????г?????????????t???????????????????36?????Ш?ν??????г?????????????г????1.808 GHz??????Q???????1???г?????????????????????????С??????У?????????????????????????????????????????3????

?3?????36???????г???????μ???????????????????????????????????????????????????????

??????????????????????????????????????????????????????????????????????и???У????????????????????????????????л?????“???”????????????????e????????????????????????????????????????????????????????ο???????????γ????н????б????????????????34.1???????????????????????90??????????????????????????????????????????

?????????????????????????????????????????У???????“?????????????????????????????????棬??????????????????”????????????????????????????????????????????????????????????????????????????????????ú?????????????????????????????δ??????????????

????????????????????о???????????Щ???????????????????????????????????????????????????????????????????????м???????????????????????????????????????о???????????????о???????DARPA????????

?????????https://www.nature.com/articles/s41566-020-0588-y.epdf

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????????????????????г?-2020?桷??