????????????????????е???????????????????????????????????????????С???????????????????崫????????????????????????????

?????????????????????????ù?????????????????????????????????????????????????С??????????

?????????????????????????????????????????????????????????????????????????????????????????????о????????????????????????????100nm???????????????????????????????????????Щ?????

??????????????????????????????????University of Electro-Communications????Oshita Masaaki??Kan Tetsuo?????????????MEMS???α?????????????????????Au??????????????????????????

?1 ???н?????????MEMS??????????

???о???????MEMS?????????????????????????1??a?????????N??裨n-Si?????????????????????????????????????MEMS???????????????????TM??????????????????θ?????????????????????干??SPR????????????????????????????????????????SPR??

????????????????????SPR?????????????е??????????????n-Si????γ?Ф????????????Щ??????Ф??????????SPR?????????????I??θ???????????????SPR???????

??????????????????????????????????????????б??????????????????θ??仯????????SPR???????????????????????????????????????????С????????????????仯?????

?2 ??????????????a???????????磻??b????????磻??c, d??????г???е?????г???е????μ?????????е???ε???????????????e?????????????f???????SEM????

????????????????????n-Si??????????????????y?????????????????????壨SP????????????????????????????е???????????????????????????????????????????????SPR??????????????????е??????

?3 ?????????ег??????

????????-21︒??21︒???????裬?????????????????仯???????????????й?????????????????С???????????????????????????????С??????????IoT??????????

???о?????2020??2??4???????ACS Photonics???????“Reconfigurable Surface Plasmon Resonance Photodetector with a MEMS Deformable Cantilever”???????????https://pubs.acs.org/doi/10.1021/acsphotonics.9b01510??

?????????

???????????????C12880MA??

??nanoLambda??????????NSP32-V1??

??Consumer Physics???SCiO?????????????Я????????

????????????????-2018?桷

????????崫??????????-2018?桷

????????崫??????????????-2018?桷