???????????????λ?????????????????????е?Zepsor Technologies??????Zepsor???????????“MEMS???????????????”??????????????????????????????????

Zepsor????????????????MEMS??????????????????????????????????????κι??????????????????????????豸????????????μ?“?????????always-on??”???У?????????????豸??“?????????”?????

???????????Zepsor????????????ù????MEMS?????????????????л???????????????????????????????????????????????????????????????????????????????????????????????????

MEMS???????????????????????????????????л?????????????????κι?????????????/???л???

??????????????Zepsor???????о?????????????????е???????MEMS???????????????????????γ?????????·???????????????????????????????????

Zepsor???????????????????????似?????????????????????????????????????????????????????????????????????????????????á?

Zepsor??????????Northeastern University??????Matteo Rinaldi????????????????о???Zhenyun Qian?????2021??1?1?????????????????????Rinaldi???ι?????????й??Quan???ι??????????????

?????????????????????2015???????????????????????????????DARPA???????????????????????÷???·??????????????????

2017??9?·?????Nature Nanotechnology?????????????Zero-power infrared digitizers based on plasmonically enhanced micromechanical photoswitches????????????о?????

??????????壨STMicroelectronics??????????????????????TMOS????????????????????TMOS????????????????裨SOI?????????????е?????????????MEMS???????????????????????????????????MOS?????????????????в???????????????

?????

2023??1?￡?Zepsor???????DARPAС????????о???SBIR???????ε????????180?????????????????3???????????????Zepsor???????Silicon Catalyst Angels?????????????????????????????Щ???????????ARPA-E??DHS????Zepsor????Ｏ??300???????

Rinaldi??????????????б????“??????????????????????????????????????????????????????????????”

????????Zepsor??δ???????????????????????????????????????

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??????????г???????-2022?桷

??С???????о???????????????г?-2020?桷

????????????????????г?-2023?桷??