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Douglas Sparks?????????????????????????????2015????????Maxim?????????????????Maxim???????MEMS????????????????????????????????????Douglas Sparks???????δ???????????

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Maxim???????MEMS?????????????Maxim?????????????????????Maxim???????SensorDynamics?????ɡ?2011??Maxim???????1.65??????????????????????MEMS????????????????SensorDynamics??SensorDynamics??????λ??μ??????????????Lebring???????????MEMS???????????????????MEMS??????????????????????????????г?????????????????????????г????????????????μ?????????????????????????鼰???

“?????????????????????????Maxim???????MEMS???????????????й????????????????????????г??????” Douglas Sparks??????“????????????????1??????????о?????Fraunhofer??????????????????????1??????????о????????MEMS????????????г???20???????????SensorDynamics???????????????????о????????????????MEMS?????????????????????????????????????????????о???83??MEMS?????????????????????????????????Maxim?????SensorDynamics???????15???MEMS??????????飬?????????????????MUMPs Foundry???????????MEMS ????????????????????????????????MEMS??????????????”

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Douglas Sparks?????????????????Purdue University????????????????λ???????100????????????????47???????????Douglas Sparks??????????????????????????????????????????MEMS????20??????2011???????????????????и???á????????????Douglas Sparks?????????NanoGetters?????????????Integrated Sensing Systems?????и??????????????????????????Delphi Automotive System????????????????????Delco Electronics???????????????1?MEMS??????????IC??????????

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