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??????MEMS?????????Bosch???????MEMS???????
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????????MEMS????????????????Robert Bosch????????????Akustica?????MEMS???????????????п????????????????????γ????????????????MEMS?????????

- ???????Akustica???????????????MEMS????

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????????MEMS????????????????•??????Robert Bosch????????????Akustica?????MEMS???????????????п????????????????????γ????????????????MEMS?????????

Akustica?????????2001?????λ????????????????????????????????????CMOS MEMS ??????????????????????????????????з?????????????????????????????豸??????????2009??8?￡??????•???????????????Э?????Akustica??????????????????MEMS???????????????????????????????MEMS???硣??????Akustica?????MEMS?????г??????????????????????????????????????MEMS?????г??????????1%??

λ????????Ъ??????????е?Angle Advisors????????Akustica?????MEMS???????????????????????????Christopher de Movellan??cdemovellan@angleadvisors.com????Nolan Monforton??nmonforton@angleadvisors.com????

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