???????????????Materion?????????????3000???????????Heraeus?????λ??1???解??в??????????????????????Materion?????MEMS???????????????????????????????в???????г???λ??????????????????Materion????????????????λ???????????????????????????Materion???????????????5000~6000????????????2017???????????2016??Materion????????????????????1.763???????

Materion??????????MEMS?????????塢MEMS???????LED?г?????????????????????????????MEMS??????????????????????????????????PVD?????Materion?????????????????????PVD????????????з??????????????????????????????塢MEMS??洢?????????PVD?????????Materion????????Heraeus????в?????????????????????????????????????????????????в????????????????????и??????????135??????

“??????????????????????????????????????????β??????????????????????????????в????????????????????????????????Materion???????Щ??????л???????г???λ????Щ??????????????????????????????η????????????”Materion????????????Donald Klimkowicz???

Materion??????λ?????????????÷????o?????ù???????????????????г?????????????????????????????????????????????????????????????塢???????????????????????????????????????????????????

“??ν?????Materion???2005?????????????????????????????????????????????????????????????????????????????????????????β???????????????г??????г???????????????????????????Heraeus????????????????????????????????????????????????????Materion??????”Materion????????й?Richard Hipple???

?????????

??????о???????????г?????-2016?桷

?????????????????г?????-2016?桷

??????????3D IC??2.5D????????????-2016?桷

????????????????г?????-2016?桷

?????????????и??豸?г?-2016?桷

????????????3D IC??????????豸??????

??memsstar??Plasma-ThermЯ????????????MEMS?????????