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??????MEMS??????????MEMSCAP?????????????????????Science Corporation????????????Э?飬MEMSCAP??Science Corporation??????λ??????????????MEMS???????

??????????????????????????MEMS??????????MEMSCAP?????????????????????Science Corporation????????????Э?飬MEMSCAP??Science Corporation??????λ??????????????MEMS??????????????MEMSCAP??????????FABLITE?????????MEMSCAP???????????????????????????????????????????????????????????????????л?????豸?????????????????????????????????????????300???????

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????????????????MEMSCAP??Science Corporation??MEMSCAP??????????????????????????????Э?顣??Э?????????3???о??????????????ν????FABLITE???????????MEMSCAP????????MEMSCAP????????????????????????????MEMSCAP???????????????????????????????????μ??????????????????MEMSCAP?????????????????

MEMSCAP???3????????й?Jean-Michel Karam?????“??????????Science Corporation????????????????????????????????????????1?????????MEMSCAP??????????????????????????????????????????????FABLITE??????????????????????????????????????????????????2023??”

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????????MEMS????????????IMU???????????-2022?桷

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