??????SilTerra????????MEMS??????????Arjun Kumar Kantimahanti

?????????????????????????????????????SilTerra?????????MEMS-on-CMOS????????????????μ????????磺????????????????PMUT?????MEMS?????????????????????????SAW???????沨?????????????????????RF????????????????BAW?????????????????SilTerra???????????????????????????????????????????????????????????????

MEMS Journal????????SilTerra????????MEMS??????????Arjun Kumar Kantimahanti??????????????????SilTerra???????????MEMS?滮???δ??????·?????????????????????????RF???????MEMS???????????????á?

MEMS Journal?????????????SilTerra??MEMS?????????????????????????

Arjun Kumar??SilTerra??MEMS??????2010???????????MEMS???????????????У??????????????е????о???????????MEMS???????????????0.18???CMOS???????????????????????????????????????????????????????????е???????1 MPixel WXGA??

?????????2011????????????MEMS-on-CMOS??????????????RF MEMS??????????????????????????????г?????????????10 MHz??2.4 GHz?????ο????????????2015????????????MEMS????????????????к???????????г??????????????????

SilTerra?1??????????PMUT????

MEMS Journal?????????????????MEMS????????

Arjun Kumar??SilTerra??????????????????BCD??RF CMOS??CMOS???????????????MEMS????????????????????????MEMS??鲹?????е????????????????????

MEMS Journal??SilTerra????MEMS?????????????δ?????? SilTerra????MEMS???????ι滮??

Arjun Kumar??????????????????????MEMS-on-CMOS?????????????????????????????????????г?????????????????MEMS????????????????????????????MEMS???????????????????????????????????SilTerra?????????5?????MEMS????????????????20%??

MEMS Journal????????MEMS?????????????????????????????????Щ???棿

Arjun Kumar????????????????????????????MEMS-on-CMOS??????????????????CMOS????????????MEMS????????????

??????????????????????????????????о?????Що??????MEMS?????????????????飬????????????????????????????????????????????????????????????????????

?????????????????????????????????????飬????????????????????????????????????

MEMS Journal?????????????????Щ??MEMS????????????Щ?μ?MEMS?豸??

Arjun Kumar?????????????????PMUT????????????????180nm??130nm???????????????????????????PMUT?????????????????????????????“?????”???????????????????????豸??

MEMS Journal??????????Щ?????????????????????????δ??1~2???????????????滮??

Arjun Kumar???????????????ú????????????????SOI??PMUT??????????????????????????顣

MEMS Journal??????????????????????????Щ?????MEMS???????????????Σ?

Arjun Kumar?????????????MEMS?????????????MEMS?????????о?????RF MEMS??????г??????SAWг??????BAWг????????????MEMS??PMUT????MEMS?????????????????????????8???MEMS????????3000????????????CMOS????????40000????????MEMS???????????????MEMS??????г?????????????

MEMS Journal????????ο???????MEMS????????????????????????Щ?????????????Ч??????

Arjun Kumar??????????MEMS??????????????????????MEMS?????????????????棬???????????????5?????????Щ???μ??????飬??????ASIC???????ɡ???????????????????????????????????????????????IC????????з??????????????????????????????????????????????г?????????????????????????????????

MEMS Journal???????????????????????????????????????????

Arjun Kumar???????????????????????????г??????????????ο????????????????????????????320 MHz??????λ?????160 fs??12 kHz??20 MHz????ο???????????????????????????????????????????AO????

MEMS Journal??????????????????????RF MEMS????

Arjun Kumar????????????????????????QFN?????2.4GHz FBAR????????????λ?????358 fs?????????????????????RF???????

MEMS Journal??????????????Щ????????????MEMS????????

Arjun Kumar??PMUT????????Я?????????á??????????????е?????????

MEMS Journal??????????????????????????

Arjun Kumar?????μ??????????????????????????????￡?PMUT???????????μ??????У??????e?????????SilTerra??PMUT-on-CMOS???????????????????????????????????

?????????

?????????????????????????????м?????

????????????????г???????????-2017?桷

??5G?????????????????????????

????????????????????????-2018?桷

????????????????????豸?г?-2018?桷

???????????????????-2017?桷