??????????????????Udo-Martin Gomez

????????????????У?MEMS????????????????????????????MEMS??????-2019?桷????????MEMS?г?????2019????2024???????????????????г??????????????????8.3%?????2024????185??????????У????????г?????????????????60%?????????г???????????λ????20%????

2018~2024??MEMS?г????

????????????????缼??????????μ??????????????????MEMS???????????????????MEMS???????????????????MEMS???????????????????????BAW?????????ī??????MEMS???????????硢??????????????????????????????????????????MEMS??????????ЩMEMS???????????籡??????????о?????????????籡????????????Globalfoundries??AlN???MEMS?????Vesper????MEMS???磻?????壨STMicroelectronics????PZT???MEMS?????Usound????MEMS????????????????????????????????????-2019?桷??????????????籡???MEMS?????г???2024??????60????????MEMS??????????????

???MEMS???????????估δ?????

???????????￡?Yole??????????г??????Jerome Mouly?????????JM????Dimitrios Damianos?????????DD?????????????????????Udo-Martin Gomez?????????UMG?????????????Bosch??????????????????????MEMS????????????MEMS??????????

????MEMS????????????????????

JM??UMG????????á?????????????????????????????????????????????

UMG???????????????????????????????????MEMS???????з?????????????????????????MEMS??????????????????????????????????????????????μ?MEMS????????

JM???????????????????MEMS???????????????????3000?????????????????????MEMS????????????????????????????????????

UMG????????????????200mm??8??磩MEMS??????????????????????????????????MEMS????????????????MEMS?г???MEMS????????12????????????????????SiTime?????MEMS????????SiTime??MEMS?????г??????????????????????????????г????????????????????????????????????????????????MEMS??????????????????????????????????????

JM???????????2?????MEMS??????????

UMG????????????????????????????????MEMS?????????????????????????з????????????????????????з?????????????????MEMS???????????鼰??????????????????????????????????????????????????????????????????

????????
- KrF??????????????130????MEMS????????
- ???б??ASIC????????
- ????蹤?????蹤??
- DRIE???????????
- ?????HF??????????????????XeF2???????????
- ?????????KOH?????
- ??????TSV??
- ???????ALD???
- PZT??AlN???????
- ??????????????????????????????????AlGe????Epi-Seal????
- ????????????Reseal
- SiRiN
- ????
- ???????????
- ????????

??????????
- ???????
  * 3?????????6????8?????У?
  * ???????????3000????
  * ???й??????????????????????????IATF 16946??ISO 14001?????????
- ???????
  * 6????8??羧???????
  * ?????????
  * ?????????????

???????MEMS????????????????????????????????MEMS????

DD?????????????????????MEMS?????????????????????Щ???????????????

UMG?????????????????????MEMS?????????????????????????????MEMS????????????????PZT??AlN?????????????乤?????????????????8??羧??????????????????????豸????????e??????ULVAC????????豸????PZT????????????????????????????JDP???й?????????????????????????SPTS??Sigma PVD?豸????AlN?????????????????籡?????????

DD?????????????????????????????????????????-????????????????Щ????????????????Щ???????????????????

UMG??????????????MEMS??????????????????????????????????????????????????MEMS??????????????????????-???????????弤?????????PLD?????????????????????????????????????豸???????????????????????????????в????????????????????????????y??乤?????????????κ??????????????????????????????????????????

???????

PZT??e31??-12~-14C/m²??????Χ??500~2000nm???????????????????<10%

AlN??e31???-1C/m²??????糣?????10??????Χ??200~1500nm?????????????<50MPa?????????

DD???????????????Щ???MEMS??????????????

UMG???????????????????????????????MEMS????????????????????????????????MEMS???????????????????ī?????????????????????????????????????????????MEMS?????????????????????????????????????

DD??????ο??????MEMS?г????????????紫?й?????????????

UMG???????????г?????????????????г???????????MEMS???????????????????????????????AI???????????к???й???????????????????????????MEMS?г????????????????????????????????????????????MEMS??????AlN??PZT?????????????????????á?

??紫??????е??????????AlN????“CMOS??????????????”???AlN??????????糣??????????????????????MEMS???????????????С???豸?????????????????????????????????л??????????????MEMS???м???????????????????MEMS??????????????????????????????????????????????MEMS?????????????????μ???????

JM????ī??????????MEMS??????????????????????????????????г???????????к?????????MEMS?????г?????????

UMG?????MEMS?????????????????????????????MEMS??????????????????“???4.0”?е???????????????????????MEMS??δ???г???????

JM????????????????????????????

UMG??MEMS????????????????????????????????????MEMS???????????????????????????????????????????г?Ч?????????????????????г???

?????????

??MEMS??????-2019?桷

????????????????????????-2019?桷

??5G?????????????????????????

??Vesper????MEMS???磺VM1000??

?????iPhone XS/XR????????飺???AFEM-8092??

????????????????г??????????-2018?桷

?????????????????????????????м?????

????????????ī???????????????-2018?桷

????????PrecisionCore?????ī??????

??Xaar 1201?????ī??????

??Silicon Sensing??????????Z????????????2??????????CMS300??