IC??????δ???2???????????0.51????????3?????δ???????????2??????????????????????????????Q????????????????????????г??????MEMS?????????δ????????????????п???????????????4???????????????????????????????

?δ???2?????1.33?????????21.5%?????2.9%???????30.5%?????1????????????Q???3673???????????3569??????????????0.51???

?δ????????2???????????????NAND Flash????IC?????2???????????9???MEMS??????2?????????????????????????NAND Flash????IC????????????????????????????????2??NAND Flash????IC??????????1???????????2???????????3??????????????????????????????????????????

??MEMS????????????棬?δ??????????MEMS???????п???????????????4????????????MEMS?????????о??????????????С??????????????????????С?????????????????

?δ???????????????δ???????????????????2???????????????????????????????MEMS???????????

?????3????????δ???????????2???????????????????2?????????????????????????????????????