??????δ??μ??????????2015???й?????????豸????????????????????????δ??????????????????????С?????????????????????MEMS???磬????????????1.2V??????3SM102EZT02A???????????????6?3?????

?δ??????????MEMS???缼????????TinySonic???MEMS???????????????С?????Ψ??????????????о?MEMS???硣?ò????????????????????????????+/-1dB?????????????????????

?δ????????η?????1.2V??о?MEMS???粻????????????????Χ??????????????????AOP????122dB?????????????????120uA????????????????????о??????????￡????????59dB???????????????????????/???????????豸????????豸????????????????????????????????????????????????a???????2.7 x 2.0 x 1.0 mm???С????????????????????????????????????????????????????????????

?δ????????MEMS?????ü?????????????????????????????????????????????????????????????????????3SM102EZT02Aо????????????????????6?·????????????