?????????????????????????????????????Korea University of Technology and Education???????о??????Microsystems & Nanoengineering?????????????????????????MEMS???????磨DM???????????е??????????????????????????п??????????????λ??

???????????Ormia ochracea???????????????????????????в???????????????????1a?????????????????????????????????????450-520 μm?????м??????ò????????“????”????????????????????????????????????????????????????????????IID?????????????ITD???????λ????????????????Щ?????????????????????γ?????????????????????????????????????????ù??????????????1b?????????Щ???￡?IID??1dB????12 dB??ITD?? 1.5µs????60 µs???????IID??ITD?????????5KHz??????30°????Χ???±2°???????λ??SSL???????

?1 ????????????漲λ???????????????

?????????о??У?Miles???????????????????????????????????SMD?????????????????????????????????????????????????????????????￡???????????????????????????????????????????λ??????????????????????????????????????????????????????????????????λ??????IID??ITD??Miles??????о?????????SMD???????????????????SMD????????????????е???漲??????????????о????????????????У???????????磨OM₁??OM₂????????????????????????????????UC_d???У????1c????????????????仯???????????????????????????????????????????????????????????????С?????????????????????17.9 dBA?????????????????????????Щ?????????????????÷????????????????

Gibbons????????Miles??????1995???????SMD??????????????????????????????????????????е?MEMS???????硣????????????????SFD????SMD??????????????Pandey???????Ishfaque??????????????μ??????????SFD??????????????????????????????????????????????????????е????????????????????????????????????????????о????????????????????????????????????????????SFD?????????????????????????????????λ???????????????????????????λ?????????С????

?????????????????????MEMS?????????????б???????±90°??????????????????????????????????????????????????????????????????ε?????У????????????????????????????Ψ??????????????????????????????????????????MEMS?????????SSL??????ò???????SSL???????￡????????±6.31°??±7.05°?????ò????????±5°????????????????????t???????????????/????????????????????SSL??????????????????????о?????????????120°??λ?????????????????????????????????????120°??λ????????????????????????90°??λ?????ζ??????硣???????Щ????????????SSL???????????????X–Y??X–Z??Y–Z?е??????棬???????????X??Y??Z?????SSL??????е?????????????????SSL??????????????????????????

?2 ????????????????MEMS????????????

??????????о??????????????????????????????MEMS???????????????????У?????????????????????????????SSL????????????????????У?????????????????MEMS??????????120°???????????????????????????е???????????λ???????±30°???????0°??360°????????????????????????????????á????????????????????????????Z??????????????????????????????????????н??з??????棬????????????н????????????????????????????????SSL?????????????????±2°???????????λ???????????±1.28°?? ????????????仯????????????±4.28°???????о?????????????′??μ???1??????????????????????????????MEMS??????????????SSL????2????????紫?м???????????????????????????3????????????SSL?????

?3 ????????????????MEMS??????????????10 kHz????1 Pa????μ?????????λ????

?????????

Rahaman, A., Kim, B. An mm-sized biomimetic directional microphone array for sound source localization in three dimensions. Microsyst Nanoeng 8, 66 (2022).

https://doi.org/10.1038/s41378-022-00389-9

?????????

???????????????г?????-2020?桷??