????????????????????????????????????Seoul National University?????????????????????Δ-Σ ADC??????????MEMS???磬???е??????·????0.18μm CMOS????????????0.98mm²????94dBSPL??520μA?????????￡?A?????????SNR???62.1dBA??????????????4.5dBA????????

MEMS???????????????????????????????????????????????豸?С???????????????磨ECM??????MEMS???????????ɡ?????????????????????С???????MEMS????????????е????????????????????????????????????????MEMS????????????????в??MEMS????????MEMS????????????????Χ??????MEMS?????????????????????????????

?????????????MEMS????????е?????????????????????????????????DC???????????С???????????????MEMS????仯????÷?????檔????????????????????????MEMS DC??????????????????????????????????DC?????????MEMS??????????仯??????????????????????·??ROIC????????????Χ????ADC????????÷??????????????????????????÷???????????????????????????????????Δ-Σ ADC?????????÷???????????????????????????????ADC?????????????????????????????

????????У??о??????????????Δ-Σ ADC??????????????????????????￡???Ч???????????????????????????????????з????????????????ADC?????κ????????????????棬????????????????PGA??????????????????о??????????????????????Δ-Σ ADC????PGA??????????MEMS???硣

?????о???????????MEMS??????

?о??????????MEMS?????????·????0.18μm CMOS?????????????????????У????????ο????磨???????94dBSPL??1kHz????????????????MEMS??????????????Audio Precision AP2722????????в????Audio Precision AP2722????????????????1kHz???????????????????紦????1Pa????94dBSPL??????????????????????8V??????￡?????????????????MEMS???????????-40.5dBFS????????57.6dBA????????????????????????-28.4dBFS????????62.1dBA????????????????????????????????????????????4.5dB??

MEMS???????????????????

????94dBSPL 1kHz????????????a??????????????ADC???b????????????ADC??????2???MEMS?????????????

?????????о??????????????????????Δ-Σ ADC????PGA??????????MEMS???硣?????????????????????????Ч????????????????DAC??????????????????????????????MEMS??????????62.1dBA????????·????0.98mm²????1.8V??????????520μA??

?????????https://ieeexplore.ieee.org/document/9815231

?????????

??MEMS?????????????????????-2022?桷

????????????????????г?-2022?桷

??????????????г?-2021?桷

??????????????????????г?-2021?桷