MEMS?????????????????????????????????????????????SPL??????У?MEMS???????????????????????????????????????????????????????????MEMS???????????????????????????????????????????????????????????????????????и??????Ч????????????????????MEMS???????????????

?????????????????????????????????о???????????????????????PZT?????????MEMS???硣???????籡?????????????????????MEMS????????????????????????????????????????????????г??????о??????“Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film”???????Microsystems & Nanoengineering??????

???????о??????У??о???????????????PZT????????????????????????-????г??????????????????????????????????????????????????????????????MEMS?????????????????÷????????г???????????????????????????????????г??????????????????????AOP???????PZT???????????н??????????????????????????AlN???????????г??5.8%??????PZT????????????????г??24.9%??????????糣??????????????λ??????С??繅?????????????????????????

?1 ???????????????MEMS????????

?2 ????MEMS?????????FEM?????????????????

?о????????????????α??????????????и????Ч??????????????????????????MEMS????????????г???跡?????????????????????????????0 μm????340 μm??????MEMS?????????????74.6 kHz????106.3 kHz??????????????????????????????á????????????仯???????1 kHz??????????????22.3 ~ 25.7 mV/Pa??С??Χ??仯????????????仯??С?????????????????SNR?????о???????PZT?????????????????????????????????????????????????????????????????????????25.7 mV/Pa??????36.1 mV/Pa??????????????-68.2 dB????-82.8 dB????????????36.4 dB?????53.9 dB??

?3 ????MEMS?????????????Ч?????

?4 ?跡??LDV??????

?5 ????????????????

?6 ????MEMS??????????????

???????????????о????????????PZT??????????MEMS?????????????????????????????????????????????????????????????????????????????????PZT????????????????????????????????MEMS????????????????????

?????????https://doi.org/10.1038/s41378-024-00767-5

?????????

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷

??MEMS???????????????-2022?桷??