??????????????

???????????????????

2017????????粩???????????????????LED???????????????????????????????????????????LED?е??????????????????LED??????LED????豸??????????????????????????LED??????????????????????????????????????????????????LED???????е????壬???????????????????o齨???????????????????????????????????????????????????????????????????????????????????ü?????????δ??????????????á?

??????????????????2017??9??13???賿????????????iPhone 8??iPhone X??????????????????????????????????????????????棺???????OLED????????????3D???м?????OLED???????????????????????????г??е????????????????iPhone X????????????????????????????????????????????????????????г???????????г???OLED??????????????????????????iPhone X??ú??????OLED?????????????????????????????????????????????????????????г??????????????????????????iPhone 8????OLED??iPhone X?????????????????????????????????????????

????3D???м????????????1???????????????????????????????????????????????VCSEL?????????????VCSEL????????????????LED??????????????????????????????????????????????????????

?1 3D???в??????????????????п???????????VCSEL?????

iPhone X??????????????VCSEL??

???????????????????????3D???м?????3D???м??????沿????????3D??????裨3D???У???????????????????????????????????????????????????????????沿????У?????????????????????????????????????????????????????????????????°???????????????????????????????????????????????????????????????Щ???????????????????????????????????

??????????VCSEL????????3D???????????????????????????????????ToF??Time of Flight????SL??Structural Light???????3D???м?????????????????3D???м??????????????????3D???????????????????????????????????“??????+??????+????????”??????????????????????????????????????3D??????????????ú????????????????3D????????????LED???????????????????VCSEL???????????????????????LED?????????????????棬????LED??????г????????1?????????????????????????VCSEL???????С?????????????????????????????￡??????????3D??????????????VCSEL??????????????????????????????????VCSEL??Vertical Cavity Surface Emitting Laser????

??????????VCSEL????????????

?????VCSEL????????????????????????????????????????Щ????????????VCSEL????????????????

???????????????????

????С???????????????????????飬????????????????о???????????????????????????????????????????????????????????????????????????????С???????????е?????????????????е????(v)????????????????(n)??С??????????е????(v)??С??????????????(n)????

?????????????е????(v)???????v(????)??v(???)??v(????????)??v(???????)???????????????????(n)???????n(????)??n(???)??n(????????)??n(???????)??

DBR??Distributed Bragg Reflector???????????????

????????????????????????????????????????????????ò??????????????????λ/4n, λ?????????n??ò??????????????γ????????(n??)????????С(nС)?????????(n??)????????С(nС)…??????????????2(a)??????????DBR???(Grating)???????????????????????????????????????????????????????????С???????????????????????????????????????????????????????????????????????DBR?????????????????????(??????Χ???)????ɡ??????????????(??????Χ??С)???????2(b)????????仰???DBR????????????????????(??????Χ??С)?????????????????????????????(LD)????????????????(LED)??????????????????????????DBR???????????LED??????????????????????????????????????DBR?????????????2~3%???????

?2 ??????????侵DRR???????

?????г??Ч?(Resonance)??

???????????????????г???(Cavity)????г??????????????????????????3?????????????????????????????????????????????????????????????г??Ч?????????????????????????????????????DBR?????????г?????г??Ч???

??????????繽????(EL??Electroluminescence)??

????????黯??????????(GaAs laser diode)????????????黯??????????о?(??????????????С)??????????????繅??????о??????????о?????????????????????(Pumping)????????????????(???)??????????????????????????侵????????????г????(Resonance)???????????????侵???????????????????????????????????????????????????3?????

?3 ???????????傷??????????

VCSEL???????????

??????????????????Щ??LED???????????????????????????????????????????????MOCVD???л????????????????MBE????????????????????????????????о???????磬ICP-RIE???????????????????????????????????Mesa??????????????г????????????VCSEL??????????????????????????????????????????????????????????и???????о???????в????????????????????????????LEDо???????????μ繅?????????????????????о???????????и???????????4????VCSEL??о?????????????LED??????????????????о????

?4 VCSEL??о???????????????????VCSEL??To-can????????з??????????????????????????г????????????????flip chip?????з??

VCSEL???????????????

VCSEL?м????????????????????????????????????????????

??????????VCSEL????

?5??VCSEL????????????????InGaAs????well????????AlGaAs???barrier??????????壨MQW??????????????????LED??In?????????????3D???м???????940???????VCSEL???In???????20%?????In?????????????????????????????????VCSEL????????850??????????????????????????????????

?5 VCSEL????????о???????

?????????????????????????????????????????????????????γ?p-DBR??n-DBR???????γ?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????940????????????黯?????????940?????????????????淢??850???????????淢??????????????????????99.9%????????????????????99%??????AlGaAs???????VCSEL?????????????90%????Al0.9GaAs?????????10%??Al0.1GaAs?????DBR???????????30???????DBR???????30~35????????99.9%????????????????????24~25??DBR??99%???????????????????????????????Сг??????????????????????????????p-DBR?????????????????????黯??AlAs??????????????????????????????ɡ?

?6 ????????????????VCSEL??????????????????

???????????????????

?????????LED?????е????????LED???????????????Nick Holonyak Jr.????????????????6??????????????????????Сг?????????????????????????????????????????????????????????????????????????????????????????????????????????????????VCSEL?????????????????????????????????????????????????????????????????????????????VCSELо???г?????????????????????????й???????????????????????????????VCSEL??????????о??????????????????????????????????????7???????????AET Technology???????????????????黯????AlAs????????????????AlOx???????????????????????仯???????????????????????????????????豸????????????????????????????????????????????????VCSELо?????????????

?7 ????AET???????????VCSEL???????????????豸????VCSEL?????????

??????????????????????

??LED?????????????????繅????о?????????????棬??????????????????????????VCSEL????????????????????????????????????????AlAs????????????????г???????????????????????????????????????????????????渲???????????????????????????????????????????PECVD???????????????????????????????????????????????????????????????????????????????????ALD??????????PECVD?????????????????8?????ALD?????????VCSEL??????????????????????Al2O3?????????????????????????????????????????????????????????о???????VCSEL????????LED????о?flip chip??IC??Fin-FET?????????????????????????????????????????????????豸??????????Picosun?????????Apply Material??????ò??????????????豸?????

?8 ????Picosun????????????ALD??????????????豸????????VCSEL???????????

???????????????VCSEL?????????????

VCSEL????????????г???“??????”???????????????????????3D???е????????г???????????????OPPO??VIVO??????????????????????????????????????????????10??????????????????????????2-3??VCSEL???????????????????????г????????????VCSEL????????????8???????????2020????????????21???????δ??????????????3D???У???VCSEL????????????????γ???????????????????????????AR???????????????????????????е?????y?????????С???г????????????????9?????VCSEL?г???????????????

?9 VCSEL???????δ???г?????

???????VCSEL???????

???10?????????????VCSEL???????????????????LED????????VCSEL??????????ν??????????????????????????????????VCSEL???????????????????????????????????????VCSELо???????????????????????????????????У?????????????????????????????????????????????????????????????MOCVD?豸?????????????????л???????????????????????????????????????????????????????????????Intelligent??Vertilite?????????????????????????????????????????????????????????????????

???????????????????????????????????????????η??棬??????????????????????????????????о???????LED???????????????????о??????????????黯??о??????????????VCSEL?????????????????￡???????????3D??????????Lumentum???????????????????3D????????Heptagon??AMS????VCSELо???????????????????黯?????羧??????????Princeton Optronics?????????????ε??????棬??????????????????????????????????????????????????????????????????????????????????????????????15?????VCSEL???????????????????????????????????δ???????????????????VCSEL??????????????????????

??????????????????VCSEL??????????????????????????????????????????????????????????????л??????

?10 VCSEL?????????????

?й?????黯???????VCSEL?????

????????????黯?????????????????????????????????У????????????????μ????????3D????????黯??VCSEL??????????????????????????LED???????????PA????????黯???????????PA???????????????????????????????????????????????????????????????У????2G????????????PA??3G???????????4G???????????????????5G?????????????????????????????????????????е??? 4G????????????????????????????????????????????????2.26????????????????????????????????????????黯????????????????????????黯??/?????/???????????????????????????徧??????????????в????????????е????????????????????????????ν??С??

?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????黯??PA??VCSEL???????????????????????LED?????????????????????г?????????????????????????黯???????????ò????1??0????????t???????????t?????????????PA?????????????VCSEL?????????????????Щ?????黯??PA??VCSEL?????????????????????????e??????????????????????????????ν??????δ??????????????????????????????????????????????????????PA??RF?????????????黯?????????????????????????????????????????????TruSignal????Ч???????????????????????λ??????????????????????????????

??·?????????黯???VCSEL???????????????????????С???Σ????????н?Σ?????????????????????????з??????г?????????5G??????????????????????????PA??RF????????????????????????????3D???м???????????????VCSEL???г?????????ü?????????????????μ??豸?????????????????????????????飬????????????????????????VCSELī?????

???????????????

?11 δ??VCSEL??3D???е???????

?????????

??????LED???????????????ú????????

???????淢?傷??????VCSEL???г?-2017?桷

??3D????????-2017?桷

??CMOS?????????????-2017?桷

??????RealSense 3D????????????????????????

??????Phab 2 Pro??????????ToF?????????

?????iPhone 7 Plus????????????頃