?????????????????????豸?????????????????????????л?????????????MOCVD??????????????MOCVD????????????????????ó????????

???г????MOCVD?豸???????Aixtron??????????AMEC????????壩??Veeco????????????????????????2020??MOCVD?豸????????????μ???????????????????????????????

MOCVD??????????????LED??????????????/????????????????????豸??????????????MOCVD?????????о?????????????????????????????????????廯??????????????????????????InP?????黯???GaAs??????????GaN????

LED?????MOCVD?豸??????г???????????????????????????MOCVD?豸??????ò????????????????????Veeco?????????????Ronald Arif?????“???磬3D???????Face ID????????????淢?傷??????VCSEL???????????????????????????????????????????????MiniLED??MicroLED??”

????????????????MicroLED??MiniLED???????LED??"??С?汾"??????LED????????????????????????VCSEL?????????Face ID?????????Face ID??????????????????????н?????????MOCVD???????GaN????????????????????????????????????

?????????????????????????MOCVD?豸?г?????????????????2019?????????????MOCVD???????????2020???????????????????????Gartner?????Bob Johnson????????2020??MOCVD?豸?г?????4.45???????????2019???4.65???????

???????????????????????????????MOCVD?г??????MOCVD?г?????????????г???????????VCSEL??????????????????Stifel Nicolaus??????Patrick Ho?????“??????г??????????2????2.5????????????????????????????????????????????Щ?????檔”

???MOCVD??

1968?????????????????Τ?????????????????MOCVD???????MOCVD?豸??????????????????????????????????

?????????????MOCVD????????20????80????????MOCVD??????????г??????????????????????????????о????????γ???????????????

?????????????в???????豸???????????????о?????????????????????????CVD??????????????????????洢????????CVD?豸?У??????廯??????????????辧????????塣??Щ?????????????淢????????γ????????????????????????г????”Lam Research????????壩????????鼼?????Dennis Hausmann??????н????

?????????????PVD??????????γ?????????????????????????ALD?????????????????????????????????????????

MOCVD?????????????????CVD?????????????????????????CVD?豸?????????????????????????????????MOCVD?豸????MOCVD??????????л????

?????????????????MOCVD???У????????????????????С?????????????????????????з??????????о??????????????????????????????“????”??????????????????

MOCVD???????????????????“?????????MOCVD?????????????????????????????????????????GaN?????????????????????GaN-on-Sapphire??????????????????GaN-on-SiC?????????????GaN-on-Si????”Veeco??Arif???????????????????饗AsP???????а????黯???GaAs???????????InP????“??????????VCSEL???????傷??????EEL??????????MiniLED??MicroLED????????????漰????????AsP??????????GaN??”

???MOCVD?????????豸??????????????в??????磬Aixtron??MOCVD?豸?????????????Veeco??MOCVD????????????“TurboDisc”?????????????У?????????????“TurboDisc”??????????????????????????????????????????????????????????????????????????

Veeco???????????Lumina MOCVD???????????????????????EEL??mini/MicroLED??VCSEL???????????????????150 mm?????????AsP?????Veeco?????????????????????????????????侺??????Aixtron??????о??????????

??LED????MiniLED????microLED

LED?????????????1962?????????????GE??????????????????????????????LED?????MOCVD??????????LED??

LED??PN???????????????????LED?е??????????RGB??????????LED??????С?LED????LCD????????????????????????????????????

LED????LED?????????ɡ????????????????SiC???????MOCVD?豸?????????GaN??????y???????????????????????????????衣

LED????????????????????????????????г??????ɡ?LED????????????????????????????????????????????

????????????????????

?????????????????????????-2019?桷??

???????????????й?LED?????????????????????????????2010??LED?г???????????????ξ??棬????LED?????????????й?????????LED????????????????????乺??MOCVD?豸??LED??????????豸???????????г???MOCVD????????????????????й????????δ????????“?й????????????????????LED?????MOCVD?г???????????GaN LED?????????????????”Yole?????Amandine Pizzagalli?????

???й????????LED????MOCVD?豸??????й?????——????????????Stifel Nicolaus??????Patrick Ho?????“?????LED?г???????????????￠???????????δ??????????????”

????????????LED????MOCVD?????Щ??????????????????????????о??????????????????MicroLED??MiniLED??????????饗Facebook??????????????????????MicroLED????????е????????

MiniLED????LED??"??С?汾"??????100um?????????LED?????MiniLED???????????????????????з??е?MicroLED??LED??"???汾"?????С??100um??????????LED????????MicroLED?????????????豳????????????????????г????????????????MicroLED????????????????????????????????????????

MicroLED?????????????????????Aixtron?????Bernd Schulte?????????ε綽??????????“??MicroLED????????棬????????????MicroLED???????????????????????????????????????????????????С???????豸???????”

????MicroLED?????Щ????????磬????????????600???MicroLED????????????????????600???MicroLED??????????????????????????MicroLED????????????????????????????????

?ж???????MicroLED??????????????????????????????????????????MicroLED????????MOCVD?豸?????????GaN????????????????????????????????Veeco??Arif???“???????????????????????”

MOCVD????????????????????????????????????????????????????????????????????????????????????

“??MicroLED?????????????????????????????????????п??????????????????????????”KLA????????壩????г???????Steve Hiebert???“??????????????????????????????????????????????????????????????????MicroLEDо??γ???????????????????????????????????MicroLEDо????С????????????MicroLED???????????LEDС??????????????????????????????С???????????????????????????????”

MicroLED??????????????

?????????MicroLED??????????г?-2019?桷??

??????MOCVD???????????????ж??MicroLED?????????и?????MicroLED?????в????????t???????mass-transfer??????????????????????ж???????????MicroLED????????????????????????????

???в??趼?????????????????????????????Cyber Optics???????????й?Subodh Kulkarni?????“???????????????????????????????Ч????????????????????????????????????????·???????????顢?????顢???????????????????????饗AOI????LED???ú????????????????????”

?????MicroLED??δ???????????????????????????????????????

3D?????г??????

VCSEL????????????VCSEL??????弤????????????????洹????????????VCSEL???????ɡ??????????????????????????????DBR?????侵????????VCSEL??60??70??????????????10um??

????VCSEL?????????????????????II-VI??

Veeco??Arif???????“г??????????????DBR???侵???м???????????????????????α?????????????????????????????????????????????????????????????????侵???????????????????????”

GaAs??VCSEL????????????“???????????VCSEL???У???????????GaAs???????饗InGaAs???????????GaAsP?????????饗AlGaAs?????????”Arif???“VCSEL??????????????????????????????GaAs??AlGaAs??GaAsP???????????InGaAs???γ??????ν?????????塣”

???MOCVD?????????????????磨CD??????????????????????????????????????Aixtron??Schulte???“????????????????????????VCSEL????????????????????”

VCSEL?????Τ????Honeywell????1996??????????????????????????????????Χ?豸???????2004??????????Finisar??????????Τ????VCSEL??????????ü??????????????á?????????????VCSEL????????????????????豸????????????????

2017?????????Apple????iPhone X?в???VCSEL???3D???й???????3D?????????????·??VCSEL????????????????·??iPhone X????????????????????VCSEL????????????????????????????ToF????????????????棺?????iPhone X??ToF?????????????????????????????iPhone X???????????????????????????????????????????????30000??????????????????巴???????????3D???????????????????????о????????????????????????????????????

?????3D??????????VCSEL?г?????????

?????????VCSEL?г?????????-2019?桷??

??????????OEM??????????????3D???й??????????????棺?????????????VCSEL????????????????VCSEL??????????????????????????????????????????????????????Wavetek???????????Barry Lin??????“δ????VCSEL???????????????????????????????????á??????????????????????????????VCSEL?????з??С?”

Lin?г???VCSEL???????????á?????????1???????????????LiDAR??????????У???2??????????????????????3?????￡?????????????4????????????????????????AR/VR????

????е?GaN???

MOCVD???????????г?????GaN??????????????????????????GaN??????糡??????????????????????????????

????????GaN??????????LED???????????????????Lin???“??????????????????糡??????GaN?????????????????????С?????????????????????????????GaN???????????Ч?????????????????????????”

GaN??????????????????????????????????

????????????????????????г?????-2019?桷??

????????ò?????????????????GaN????????????????У?????????AlN???????????????????MOCVD??AlN????????GaN????GaN?????γ????????????????

“????MOCVD??????GaN??????????AsP??????????????棬???????????????????????????????????????????????????????”Veeco??Arif?????

????GaN???????????????????????????????????У?RF GaN?????????????????????GaN??????????????????м???????????????????????????????????????????壨LDMOS?????????????????????

“????裨SiC????GaN??SiC-GaN??????????Ч???????????ù?????????????????????????GaN???????й??????????????????????????С?????粢??????????????????????????????????5G??????????????????????????????????????GaN?г????????????SiC-GaN?????ü????????????”Wolfspeed????????????ü??????Gerhard Wolf???

????GaN???????????塣????GaN????????????IGBT??????MOSFET??SiC??????????????GaN??SiC???????????????????????ζ???????????????IGBT?????MOSFET????Ч??

2018??~2030????GaN?г????????????

???????????????????GaN?????????????????ü?????????-2019?桷??

“??????棬GaN???????SiC???????????????μ???????????????????????????????????á?????GaN???п???????????????С?”Lam Research????????????????David Haynes???

“???????????????????GaN???????????SiC???????????????GaN-on-silicon HEMT???????????????????????????????????GaN-on-silicon??MOCVD????????????δ????????????????????????????????????????????????????HEMT??????????????”

????

?????MOCVD???????????????????????????????й????????????????????LED?????????????????????????Щ?????????????·??

???????豸?????????MOCVD??????2020????????????????????????????????????Aixtron??AMEC??Veeco????????????????????????????MOCVD????????????????????

?????????

??????????????????-2019?桷

??3D????????-2020?桷

??VCSEL?г?????????-2019?桷

????????傷??????EEL???г??????????-2019?桷

??MiniLED??????????г?-2019?桷

??MicroLED??????????г?-2019?桷

???黯???GaAs?????????????г???

??????????????????г?-??????????á?

?????iPhone X??ToF??????????????????????

?????iPhone X?????????????

?????????????VCSEL????????

????????????GaN?????????????????ü?????????-2019?桷

?????????????????г?????-2019?桷

??????????????????ü??г?-2019?桷??