????CMOS?????????????????????????????????????SPAD?????У????????3D????????????????????????????????????????????????fill factor????й?????????????????????????????SPAD??????????????С??5%?????????????Щ???????????????·????SPAD??????????????????60%??

????????SPAD?????????????н??м?????????????????????Ч?????????????????????????????????????????е??й????????????????????????????????????????Heriot-Watt University??????????????????The University of Edinburgh???????????????????????Boise State University????????????????????????????Politecnico di Milano?????о????????????????Optical Society of America, OSA?????????Optica?????????????????????????CMOS SPAD????????????????????????????????High concentration factor diffractive microlenses integrated with CMOS single-photon avalanche diode detector arrays for fill-factor improvement??????????????????SPAD???????????????е??о??????

???н??????????32 x 32???CMOS SPAD???????????????????У??????????SPAD??????Ч????????????????????????μ?????????Ч???SPDE???????????SPAD?????????MF32??й??????????????7μm??????????????1.5%????????SPAD?????????MiSPIA??й????????????30μm??????????????3.4%????????佇??????????????????????????????????????????????????й??????????????в???????????????????SPAD???????

????????????????????????????????????SPAD????????????????????????????????????

?о???????????????????????????С?????????????λ?????????????????????DOE???????????Ч?????Ч???????????ò???????2π???????????????λ???

???????????????????????е???????

???????????????????????SPAD???м?????Ч??????????????????SPAD???е??????????￡?

??????????Coefficient of Variation, CV?????????????????е????????????????MiSPIA??MF32??????808 nm??580 nm????????????????????????????м?????????????

SPAD???е?CV???????????????????a??MiSPIA???????808 nm????2??MF32???????580 nm??CV??С???????SPAD????????????????????á?

??????????Concentration Factor, CF???????????????????????????????????????????CV??????????????????￡???????????????????????????????????????????????о??????????????????????????????????????￡????????????????????????е????????????????????????????????????????????????в????????????????????????a???????????????????????????С??CF??????????????????????????￡???????????????????????????????????b????????????????????780 nm??Ч??????CF??????808 nm?????????????????н????

CF????MiSPIA?????????м?????????о?????????????????a???????CF?????????????????CF????????????????f??????????????????????????о?????????????b????f=22?????????f=11???????????????????????????????????????о???????????

?о??????????????Χ??500nm ~ 900nm????????Χ??f=2 ~ f=22??????????????????????????н????????????????CF??CV???????????????????????У?????????????f=2????????????????CV?????????????????????????????????????????????????????????MiSPIA???д??????CF???19.5????MF32????????33.8?????????????????SPAD???м?????????????SPAD???е???????????????????????????????????е????????????????????????????????????????????????????裨PET???????????ToF???????????????LiDAR????

?????????https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-14-4488

?????????

?????????LiDAR?????????г?????-2019?桷

????＼?????г?????-2019?桷

???????????????????????-2018?桷

????????＼?????????????-2019?桷????