???????淢?傷??????VCSEL??????????????????3D???к???????????????????3D????????????????????LiDAR????????????е??????????????VCSEL??????????????????????????????????VCSEL?????????????弤???????????????????????????????Ч?檔???VCSEL???????????????????????????????????????????????????????????????Щ??????????VCSEL?????????????????????????3D????????????

????????????????????????????????Tokyo Institute of Technology???????о?????????????????????Al-Azhar University??????????Ambition Photonics??????????????????????о????National Institute of Information and Communications Technology???????????о?????????????????????????????VCSEL???ü?????????????????????????????????????????????3D??????к?????????????

???о???????????????????????????VCSEL???????????????????С???????????￡??ü???????????6?????????????????????3W????????????????????????????5A??????￡??????????????ι?????????VCSEL????????????Ч?????????????????2.5μm????????????????????????????

????????VCSEL????????????????????е?????????????????е?VCSEL??????????????????????????????????????10W???????н????佇??????????????????????????????о?????????????????γ????????????????????????о???????????????VCSEL?????3D???к???????????

??a???????????????VCSEL????????????????????b????????????VCSEL?????θ????Χ????????????c????????μ????????????????????50%??

???????????????????????????????????NEDO?????????о????????????????????????The Japan Society of Applied Physics????????????????????Applied Physics Express????

????????https://doi.org/10.35848/1882-0786/ac1de7

?????????

??????????VCSEL???????г?-2021?桷