????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????Щ?????????????????????????????????????????????????????????????

??????????????????????????????????????????????????????????????????????0.01%?????????????????????????й?????????Ч??????????????δ?????????????????????Ч????????????????????????????????????????????????????????

??????????????????????????????????2????????????

???????????????????????????????????????????????????й?????????????????????裨OCT????????飬??????Ч????????????????????X?????????????裨X-Ray CT??????????????????????OCT?????????Ｘ????????????????????????OCT???????????????к????????????????????????????á?

???????????????????????Santec???????????????????????????????о?????????????????MEMS????????г????淢?傷??????VCSEL??????????????????????OCT????????????????????????????????б??????????????????????????

????MEMS????????гVCSEL??

??????????MEMS?????

Fabry-Perot??????MEMS???????????

?????о???????????гVCSEL???о??????die-bonding???????????InGaAs??????????LD????????SOI MEMSо?????о????????MEMS?????????????-?????Fabry-Perot????????????????????????蹦??????VCSEL??????????1050nm?????????г??Χ?89nm??????????????1.5mW?????????8mA???????????????????гLD???е??????????????????150m?????MEMS???гVCSEL????н??????OCT??????????????????????OCT??SS-OCT??????????????????????OCT??????25ms??????????????????????????????

????????OCT??????a???????OCT????????b?????????????????????c????????????????

????MEMS???гVCSEL??SS-OCT?????????????????????????????????????????????????????????????????????????????????150m????????????????????????????????????????????????????????????????????????о???????????????SS-OCT???????????????????????????????????á?

??????????OCT??????????????a???????????????SS-OCT??50cm??????b?????????????????????

??????о???????????JOURNAL OF OPTICAL MICROSYSTEMS????????MEMS-VCSEL as a tunable light source for OCT imaging of long working distance????

?????????https://doi.org/10.1117/1.JOM.1.3.034503

?????????

??????????VCSEL???????г?-2021?桷????