?????????????????Swiss Federal Institute of Technology Lausanne??EPFL????????????????Э????????????????о???

?????????????????????????EPFL???1?????·????????????????о?????Max Planck Institute for Biophysical Chemistry????????-?1????-??????????Georg-August-Universität Göttingen???????о??????Nature??????????????????????????????????????λ??????????????????????о????????????????????????????????????????????????????????????????-???????????????δ???????

????о?????EPFL???ü?????????????Ч?????????????????????????????о?????????μ?????

???????г???????е?????????????????Alex Mehler/EPFL??

??????Nature??????????????????????????÷??????????????????е????????????????????????в????μ??????????????

?????????EPFL??????·????????????????о??????????о?????????????????????????????????????????????????

????EPFL??Tobias Kippenberg???“????????????裨Si₃N₄???????????·?????????????????????????????????繽?????LiDAR?????????????????????????????????????????????????????????????????????????????”

???о?????????й??????????????ù???????·??о???????????????????????????????????г????????????????

???????????????????????????????????????????????????????????????????????￡?????????????????鵼??????п???????????????????????????????

??????????Щ???????????????μ????????EPFL???о?????????????????Si₃N₄????????·????????????????μ??Ч????-?????????á?

?2 ??????????????о?????????????????λ???????

????????????????“????”

???о???????ò?????????????????????2 μm × 650 nm?????г?????С?????о??????????????????????????transmission electron microscopy??TEM??????У???????????????????·??????????

???????о?????????????г?????д?????????????????????????????????????-?????????á?????о???????????????????????????????????????????Щ?????á?

???????У?????????????????????????????????????????????????????λ?????EPFL???????????????????????????????Ч???????????????????????TEM?????????

??????????????????-????????????????????????????????????о???????????????о????????????????????????????????????attosecond?????????

????????·????????????????о?????Claus Roper???“???????????????????????п????????????????????????????????????δ????????????????????????????????δ?е?????????”

???о???????????????о????Air Force Office of Scientific Research??????????????????Swiss National Science Foundation?????1?????????Deutsche Forschungsgemeinschaft, DFG????Gottfried Wilhelm Leibniz ?????European Union Horizon 2020?о?????????????·?????Э????????????????????

?????????

Henke, JW., Raja, A.S., Feist, A. et al. Integrated photonics enables continuous-beam electron phase modulation. Nature 600, 653–658 (2021).

https://doi.org/10.1038/s41586-021-04197-5

?????????

??????????????????????-2020?桷

?????????LiDAR?????????г?????-2019?桷

?????????ToF?????????????????-2020?桷