????????????????SPAD?????????????????????????????????????????????檔??CMOS?????????SPAD?????????????????????????????·???????????????????????????????????“???????”??????????CMOS-SPAD???????????????????韁?????????????????????????о??????????????????CMOS??????SPAD???????

????????????????????????????????о????KIST?????????????????????EPFL?????????????Yonsei University?????????°??壨GlobalFoundries??????1?????????????????IEEE Journal of Selected Topics in Quantum Electronics????????????“SPAD Developed in 55 nm Bipolar-CMOS-DMOS Technology Achieving Near 90% Peak PDP”?????????????????????????KIST??EPFL??Won-Yong Ha?????????EPFL??Edoardo Charbon???????????Woo-Young Choi??KIST??Myung-Jae Lee??

?????о??????????????55 nm?????CMOS-DMOS??BCD??????????SPAD??????????????????V_B??С??20 V??????????????????p????????????PLDD???????N?壨HVNW?????γ??????SPAD??????????????????????????SPAD????????????PDP?????????????DCR???????????Timing Jitter???????????????????????????16.1 V??

?1?????SPAD??????????????SPAD?????????????????PLDD??HVNW???γ??????9 μm??PN?????????14.4 μm?????2??????????????ü?????????????????????????????i??PLDD?????????????????????implantation-induced defect???????????????SPAD???У???ii??HVNW????PLDD??????????????????????????????????????????????????????????????????????????

?1 BCD-SPAD??????

?2 BCD-SPAD?????????????

??????????VB??16 V?????????????VE??7 V????о????????Okuto?????????????SPAD??????TCAD???棬?????SPAD??E????????????????3???6?????

?3 ????TCAD??????BCD-SPAD??糡??????

?4 ????TCAD??????BCD-SPAD??????????????

?5 ????TCAD????????“???”??canyon??BCD-SPAD????????????

?6 ????TCAD??????“???”??canyon??BCD-SPAD????????????

????о??????BCD-SPAD??I-V?????????PDP??DCR????????????????????????7?????

?7 BCD-SPAD??????????

???????????????о????????????????????55 nm BCD?????????????SPAD??????BCD?????е???ò????????????V_B?????SPAD???????????????Ч?????С????????????Ч????о???????“???”??canyon??????????????????????????V_B???16.1 V????SPAD??450 nm?????PDP?89.4%??DCR?38.2 cps/μm²???????????????V_E???7 V?????????66 ps???о?????????????????SPAD????????????????????о???????

?????о?????????????????о????KIST???????????2E32242??????????????

?????????http://doi.org/10.1109/JSTQE.2023.3303678

?????????

????????????????????г?-2023?桷

??????????г???????-2022?桷