?????????????????CMOS??????????“????”????????????й?????á?о????ɡ?????????????????????п?????????????????????з????????????????????????????????Щ?????????????????

????????????????????????????????????????Arizona State University???о??????Light: Science & Applications?????????????“Chip-integrated metasurface full-Stokes polarimetric imaging sensor”???????????????о???????????????棨Metasurface???????п????Stokes????????????——MetaPolarIm??????????????????????~600 nm????????????????????У?MPFA????????????????????????????CMOS???????????????MPFA???п?????-????????????????????????????????????MetaPolarIm?????????????γ???????????single-shot?????п???????????CMOS?????????????????в???????????????????????????????????40°?????MetaPolarIm?????????????????????????????????????????????????????á?

о??????MetaPolarIm???1a????MPFA?????·???????CMOS??????????????1b??????????????CMOS????????????????MPFA?????75,000??????????????ɡ???????????super-pixel??????????????CP????????P5??P6??????????????LP????????P1??P4????????????????????????????????????????·? CMOS?????????????????????????????1c?????????????????????????LP??CP??????????????????????????????????á??1d???????????-?????????????CP??LP??????????????LP??CP????????????С???????????????????п??????????????и????????Ρ?

?1 ???????????????CMOS???????п????????????

?2a?????????MPFA?????????????????MPFA???2b???????75.2 K?????????????????????MMPF????????????3.65 × 2.43 mm²??1????????????????8?????MMPF??????????????????????????SEM????????2b?????

?о???????t????????????????LPER??????1000????LP??????????????????QWP??????????????????MPFA????????????????2c????????????SiO_x?????????????????????????VCDG????????0°????????????????????????Si???????棬Ч???35%??LPER??????650 nm?????????400??

?2 ?????????????

?2d??????????CP?????????????CD??????????????650 nm????????????????????????RCP?????????????????LCP???????????????????????????????Χ??????480 nm??700 nm????CP??????60 nm??????Χ???????????????????10????????????CPER??????650 nm????????????10%???2e?????????????500 nm??????????2???CD?????

???У???MetaPolarIm????????????????п??????????????3??????????????S₁??S₂??S₃????????????С??2%????????????б????±20°???????б????±5°??????￡?MetaPolarIm????????????С??5%????

?3 ????????п???????

?о????????MetaPolarIm????????????Щ????????п???????????4???????????и????????

?4 ????????????п????????

???????????????о???????????????????????????????????У?MPFA?????????????????????????????????????????????????????75.2 K???????ɡ??о??????MPFAо??????CMOS??????????????????????У????????????????????У??????У???MetaPolarIm????????????????п?????????????????????S₁??S₂??S₃????????????С??2%????????????б????±20°???????б????±5°??????￡?MetaPolarIm????????????С??5%????????о??????????????????????????????“????”??????????е???????п????????????????????80 nm??????????????????Щ????Я?????????????????????????????????????????????MetaPolarIm???и???????????????????????е?????????????λ????????????????CMOS?????????????????????????????????????????????????????????????????á?

?????????https://doi.org/10.1038/s41377-023-01260-w

?????????

????????????????????г?-2023?桷

??????????????????????????????-2022?桷

?????????????????????-2022?桷??