????????????????SPAD????????????????????????????????????????????????????????????????????????????????????·??????±??????????????SPAD?????????????????????????CMOS?????????SPAD????????????NIR???????????繽?????LiDAR???????????ToF???????NIR????????????????????????Щ????????????????????????????????????PDP????

????????????????????????????????о????KIST????????????IEEE Journal of Selected Topics in Quantum Electronics????????????“Back-Illuminated Double-Avalanche-Region Single-Photon Avalanche Diode”?????????????????????????Eunsung Park?????????Myung-Jae Lee??Woo-Young Choi??

?????????????PDP???????????????????????????DAR??SPAD????SPAD????????????????????????????????SPAD????40 nm CMOS?????????CIS????????????????????????????????????CMOS SPAD??????????о????????????SPAD??????????????????????????????????????SPAD????????SPAD????????????????????????????????Ч???

???????????BSI???????????SPAD??PDP????????????????microlens??????湵????????backside trench guide?????????????????????????????豸?????????????????????????????????????????1??????????Ч??????????????????????κζ????????????????????????????PDP??????????????????????????

?1 ??a??δ??????????GR?????????????SPAD??b??????GR???????????????SPAD

???2???????????????????????????о??????????????40 nm?????CMOS??????????????????????SPAD??SPAD????????P????“P+”???????n????“??n?壨DNW??”??????????????????γ?p-n???????????????????PDP?????????????p?壨PW??GR????SPAD??p-n????Χ?????SPAD????????SPAD????Ψ??????????PW GR?????????

?2 ??????SPAD???????

??????о????????TCAD????????????SPAD??2.5 V???????V_E???μ?糡???????????3??????????????SPAD?????????????糡?????

?3 V_E = 2.5 V?????SPAD??糡????????a????????PW GR??SPAD????b?????ò??????PW GR??SPAD

????о??????????????????????SPAD???????????????????????????????GR???????Ч???????SPAD??I-V???????Ч??????????????????4???5??????о????????????SPAD????Ч????????PDP???????????DCR???????????Timing jitter????????????????????????

?4 ????SPAD??I-V??????

?5 ????SPAD??????????μ????????LET?????

???????????????о????????????40 nm?????CMOS??????????????SPAD???????????SPAD?????????P???P+?????????DNW???????????????????????????????????GR????????????PDP????????????????й???????????????????????????PEB????????????????????????SPAD???б????о?????????GR???????Ч????????????????SPAD??700 nm???????89%????PDP????940 nm???????45%????PDP??????????????????SPAD????2.5 V??????μ??????????????????????￡???DCR?27 cps/μm²???????????????FWHM???89 ps??

?????????https://doi.org/10.1109/JSTQE.2023.3322354

?????????

??????????????????SPAD?????????????????-2023?桷

??????????????????SPAD???????????-2023?桷

????????????????????г?-2024?桷

??????????г???????-2022?桷

?????????LiDAR?????????г?-2022?桷

?????????????LiDAR????????????-2022?桷??