??????????棨Metasurface????????????????????????δ?е???????????????????????к???mid-IR????????????????????г????е??-???????????????????????????С?????????????VSC????á???????к??????????????????????????????????????г???????????Q?????譚?????Ч?????????????Hotspot????????????????????????????????????CaF₂??NaCl??KBr??ZnSe???????????????????????????????????????????

???????????????????????????????????????У??University of Wisconsin-Madison?????????????????Argonne National Laboratory?????о????????????????????????????????????free-standing??Si??к????????棬????????????о???????????????????ò????????Brillouin zone?????????????????????Q?????????????????qBIC??г??????Q????722?????????????????е??????????????о???????ж??PMMA????????????????г????μ?qBIC?????????????к????????????????屢????·???????????к???????????????????????????????-?????????á????????к????????????????????????????о??????“Trapping light in air with membrane metasurfaces for vibrational strong coupling”???????Nature Communications?????

?1????о????????free-standing Si???????????????????1???????????????????????????????????????????????????????????????γ?????????????????????????????С???2a??2b?????о???????????k????в?????????С???????????????????????????????????У?????????????BZF????й????????????GM????????????qBICг??????BZF?????BIC??????????????????????????????о????????????????????????????BZF?????qBIC??????????????и?Ч???????2i????????????????-????????????????????????????1 µm????Si?????2c-2f?????????????ú???????????????2g????

?1 ????????????free-standing Si?????????

?2 ??free-standing Si??????????????BZF-qBICг??

??????????????賬?????棬?о????????????2.8 mm x 2.8 mm??free-standing????<100> Si???????1 µm?????2c?????????????????EBL??????????????????????????????????????????????DRIE????????????γ??????????????????????????????治?????????????????????????????????????????й??ɡ?

?2d?????????????4 x 4???????????У????????????????????300 µm x 300 µm???2e??2f????????????????????????????????????????SEM????????в???????????????????????????г?????????????????????

??????????qBIC???У??о????????????????Δr???2h???????????????????????????Q??722???3d???????????????????????????????????????????????????????г?????????????????????????????????????-?????????÷???????????

?3 ?к???Si?????????????????????????BZF-qBIC??

??????????????γ???????????г????Χ???????Rabi????????о?????????qBICг????????????????PMMA????????1730 cm⁻¹????C = O????????????????????????????????????????????????????????????qBIC????????????????????????????????

?4 Rabi??????PMMA????????????г??????????г??仯???

?5 ?????????????????з?????????仯???

???????????????о??????????????qBICг???free-standing Si????????棬?????????????о????о???????ò?????????????????3???qBICг??????Ч???????????е??к???????????????????????????й?????????????????г????????????????????????Q????722????????????????к??????????г?????????к??????????????????????????г????μ?????Rabi??????????о?????qBICг???PMMA??1730 cm⁻¹????C = Oг??????????????????????????????????????????????????о??????????????и???PMMA????????????????????????????????????????????????????????????о??????????μ?free-standing?????????????棬??CMOS?????????????????????????к??????????????????????????????-?????????á?

?????????https://doi.org/10.1038/s41467-024-54284-0

?????????

??????????????????????????????-2024?桷

???????????Metalens???????????-2024?桷

?????????????????????-2024?桷