??????????MEMS?г????????

1 ???2010??MEMS?г?

    2010?????MEMS?г???????????г??????2009??????25%????86???????????MEMS???????г????????λ???????????????????????????????
??1???????г?????????????????32%??
??2??????????????????????????
??3????????

1.1 MEMS?г????

??1??MEMS??????????????г???????MEMS????г????????2???????
??2??MEMS???????????????????????
??3??????MEMS?????????????????
??4??????????г????8??羧????????
??5??????????????????????
     * MEMS?????“???????????????????”???????Ч??
     * MEMS????????????????????????

1.2 MEMS???

    ???????е?MEMS???????????????????????1?????????MEMS???--????????(TI)?????? (HP)??????(Robert Bosch)????????(ST)2010?????????????30?????????2009????37%????????????????????????????????????????????????????????MEMS??????????????г??????????????????????δ???????????2????????μ??????????????????????????

?1  2010??????????MEMS??????????

    ???1?????????MEMS??????????????????????????????
??1?????????5???????????????????г??????????????????/???????г???????????
??2???????????2??5??????????????л???????MEMS????????У?
??3????????????2?????????????????????????????????????

1.3 MEMS???? 

    2010????????????MEMS??????????????5.35?????????2009????????10%?????2?????
    ??????(ST)????????MEMS??????????????2.04???????
    Silex Microsystems??????3700?????????????85%?????????????????
    Sensonor??3500??????????????λ?е?3?????????????軔??????????????????????
    Asia Pacific Microsystems????????3100?????????????60%???????????幫?????????3000??????????????(TI)?????????

?2 2010???????????MEMS??????????

2 ?г???? 

2.1 2011-2016??MEMS?г????

    ?????г???????????????2011??MEMS?г?????16??????100????????????2016????MEMS?г?????????200??????3?????

?3 2011-2016??MEMS?г????

    δ??5??????????MEMS???????
??1?????????????????????????????
??2???????????????????????

    2011??????MEMS?г??????????????????7.3%?????????????????????????3%??
    2011??MEMS?г??????????????????????????????г?????Щ?г??????????25%??
    ??????????????г???2011??MEMS????????2010???16???????????21???????

    ???й???????????????????????????MEMS??????????????????????????????????2011??????????????????????????MEMS???檔
    ?????????й?δ?????????????棬??????????????й?δ?????????ξ????λ????????????“??”??????????е??????????????????й???MEMS??????????

?4 ???????????e??

3 ?????????????? 

    ??Щ?????????????????????????????????????Ρ????????????????????????????????????????????????????????????????????????????????????21?????μ??????????

??1????????MEMS????+???????
    ???????????MEMS????????????MEMS?????????????е????????????????е?????????LIGA????(X???????????????????????)????????????????????????????

??2???????????????+?????????MEMS+IC??
    ???????????intelligent sensor?????????????????????????????????????????????????в????????????????????????????????????????????????????

??3???????????????????
    ?????????????????????γ???????γ???20????80?????????????????????????????????????????????????????????????????????????????????????ε???????????

??4???????
    ???????б?Я?????????????????????

4 ??? 

??1??????3???????????2010??MEMS????????????25%??
??2????????MEMS?г???100??????????δ??5??MEMS?г????????????????14%??
??3???????????????仯??
     * ????????????????????????з???????
     * ????????????????????????????????????????
??4??MEMS?????????????????г???????
??5??????MEMS?г?????????????????????????????????

????????????????Yole??