????????

MEMS?谐??????

???2010MEMS?谐?

2010?????MEMS?谐???????????谐??????2009??????25%????86???????????MEMS???????谐????????位???????????????

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??1???????谐?????????????????32%??
??2??????????????????????????
??3????????

?1 2010??????MEMS??????? 

????MEMS???--????????(TI)?????? (HP)??????(Robert Bosch)????????(ST)2010?????????????30?????????2009????37%?????????????????????????????

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??2???????????2??5??????????????谢???????MEMS????????校?
??3????????????2?????????????????????????????????????

......

???2011MEMS?谐?

2011??????MEMS?谐??????????????????7.3%?????????????????????????3%??
2011??MEMS?谐??????????????????????????????谐?????些?谐??????????25%??
??????????????谐???2011??MEMS????????2010???16???????????21???????
???泄???????????????????????????MEMS??????????????????????????????????2011??????????????????????????MEMS???妾�

......

MEMS?谐???????

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?2 MEMS????????????? 

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?3 MEMS???????????? 

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?4 MEMS???????????

......

?泄???????????????泄?

?????????泄?未?????????????妫�??????????????泄?未?????????尉????位????????????“??”??????????械??????????????????泄???MEMS??????????

......

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