?????????MEMS????2010?????????????2009????????????????18.9% ???????е?????IHS iSuppli ???μ????????2012??2014??MEMS?????????λ??????????????????iPhone 4??MEMS????????г???????????????????????????????????MEMS????????????????

2011????????????????????????y????????????????????????IHS iSuppli?????2010????????????Gyroscope???????????5??????????????????????CES?????????2???????????????45?????????????????????????????а????????????????????????????????д???????????Accelerometer?????????????????????????????????BAW????MEMS?????

????????????й?????????MEMS???????????????й???????????????г????MEMS?????????????????MEMS?????????????г?????????????????????????MEMSо???????????????MEMS?????????????????????????С??????????????????????MEMS???????????????Ч???????????y????????MEMS?????????MEMS????????????????????????????

2011?????????????????????MEMS?г?

????iSuppli???μ?????????????????Apple ??iPad ??Android?????????????????? ?????????????????????????2011??MEMS?????????г????????????????MEMS???????????????1.4?????????2010???2970????????373% ????2014?????????????????????MEMS?????????????????????????2 ?????????????2.8???????

ISuppli??????????MEMS????????????????????????а?????????????????????????????????????????????б?????????????????????????????MEMS??????籡???????????????????3G??????????????????????????MEMS???????????2011???????????Щ???????????MEMS?????????????????????????????????MEMS????????????????????г???

MEMS?????????????????г??????????????????25%???????????????2010??????2009?????Σ?????????????????????

MEMS??????

????????????????????????У?????????2011?????MEMS??????????????????11???????iSuppli???????????????????δ???????в????????????????????????????????????????????MEMS???????

???????棬??????????MEMS????????????2.29?????????????????????????MEMS??????????μ???????г??????????С????????????2014??????????????????????????????????????????????MEMS?г??????????????????????MP3?????????????

???MEMS???—???????

??????(accelerometer)?????????????????????????????????????????????????????????????????????????????5??????????????????2014????????????????????????????????????

???????????????????????????????????5????????????????????????Apple??iPhone 4??Sony??PlayStation Move??????????У?????Щ??????????????????3DS?????????Sony PSP?С???2014??????????????????????г???????????????????????????????г???????16???????

??????2011??????????MEMS????????????????????????????????????????????????????????4G?????????; MEMS?????????????????????????????Android????????????iPhone 4???????????????????; ????????????????(DLP)о??飬????????????????á?

iSuppli?о?????????ST(??????????????????)??TriQuint(MEMS BAW filter)????Apple iPhone 4??iPad??design win?????????????????????MEMS?????????????????????硣 ???в??????TriQuint?????????????778.6%??2009????ù????????850 ?????????????????16?????????8 ????????????ST???10???о??2????????????????63.5% ?????????2009???2.16??????????????3.53?????????????ST?????????????λ??

???????MEMS?г???iPhone 4??????????????????????????????????????????????????????????????????????????μ?MEMS-based??????????????????????????С??MEMS???硣????iPad 3G?????3??MEMS?????

MEMS????????

??????MEMS???:ST

??????????MEMS??????????У????????STMicroelectronics(??????)??????????2010???ST??????MEMS???????????????????10????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????

??????5????????????MEMS?????????????????500mm³??????10mm³???￡????????????????????????????????????????????????1/10??????????????MEMS?????????????????????????????????г????糱??????????????????????8???MEMS??????????????????????????????????????????饗Land-Grid-Array??????????????????鹲????????????У??豸??????????MEMS??????????????2????5000????

????????ST??????????????50% ??iSuppli???????ù?????????δ?????????????????????????????????г? ??????????????????м?????ST???????μ???????????????2008??2009?????????????????????2010?????????????ST????1.17 ????????????ST??????MEMS??????????85%??????iSuppli????????ST?????????????????iPad ???????iPod Touch??????Samsung Galaxy Tab???Sony Move???????????????ST???????????????????MEMS?????MEMS???????????????????????????

IMT MEMS??????????????

??????2000???IMT(Innovative Micro Technology)??????MEMS??????????????30000??????class 100???????(clean room) ???????????????????Santa Barbara?????????6??羧???????????????????????????IMT???????CMOS???????????????????????????к????????????????????????????????????????????????6200 ???MEMS switch??IMT????ù????MEMS??????1 million holes/chip??22nmσ??????????0~1.5meters/sec??

IMT????MEMS???г????ù??????iSuppli????????????MEMS???г??????2014??????????????????????2010??2014??????????????11.6%?????????????????????????????????????????????????MEMS???????MEMS??????????????á??????????????????????????????????????30??MEMS??

?ù???????1995?????MEMS?????г?????????15???????MEMS??????????????????????????ī?????????????????????????MEMS??????????????????????????????????г??????????????MEMS???????????????????????MEMS?г???????60???????MEMS?????????г????????5???????????????????У???????????????????Wafer Level Package (WLP)??Through Silicon Via’s (TSV’s)??3D??????????鼰????????????????????????????????????????RF?а??????????е?????????????????????????????????????????????????????

IMT?????Χ???￡?

* ????????RF switching??interposers??reversible adhesive??sub-wavelength??anti-reflective structures??wafer level packaging????

* ???????????????WLP??????????????????

* ?????rechargeable storage??solid-state energy conversion

* ????????????????

* ???????????????(Implantable drug delivery)?????????(cell purification)?????????????(glucose sensors)

* ??????????????????????????????????? (drug discovery)????????? (molecular diagnostics)?????????? (gas chromatography)

* ?????WSS/ROADM??cabling??Variable Optical Attenuators(VOA’s)??Planar Lightwave Circuits (PLC’s)

* ??????Intertial-grade gyros(<1 °/hr drift)?????????????

* Turn-Key MEMS??????????Photolithography??Deposition??Wet chemical etch/electroplating??Reactive Ion Etching??Ion milling??CMP planarization and wafer grinding/polishing??Wafer bonding??Cleaning??Die slice??Assembly/packaging??Testing??Metrology/analysis??Design/Modeling??

ADI MEMS?????????????????????

??MEMS?????????????????ADI???????????????Wii?????????????????????????????????????????????MEMS?????????????????????ADIS 16227 iSensor???????????????

?????????Э??????豸??????????????/????/У?????????????????????????????ADIS 16227 iSensor?????????豸????????????????????????????????????????????????????????????????????????????豸?????????????????豸?????????????????????????????????????????????????????????????ЩС????????????????????????????????????????????豸???????????????????????????????????檔

MEMS???????????????????????棬?????????????е???????ADI?????????????????????????飬??MEMS????????????????п?????????????????????????????ADIS 16227 iSensor??????????????????????????п?????????????????????????????????????????

"???????Σ?????豸????????????????????á??????????????????緽??????С????????????"ADI MEMS/??????????iSensor???????????Bob Scannell?????"????ADIS 16227???????????????t?????????????????????????????????????в???????????????????????????????????"

????ADI???????????Inter-IC Sound????MEMS ????--ADMP441 iMEMS???硣ADMP 441?????д?100Hz??15kHz??????????????61dBA?????????????SNR???????80 dBFS?????????????PSRR???????Щ?????????ADI????????MEMS???????????????μ?MEMS??????t????????ADI MEMS????????????????????4.72mm X 3.76mm X 1.00mm?????????????????????????ж?????????????????

"?????????????????????????????????????????????????????????????????????I2S ????????????????綽??????????????????????????????"ADI??MEMS/??????????????????????Kieran Harney?????"???μ?ADMP 441???????????I2S???????С????λ?????????????弴?ù???????????????????????????????????????????ADMP 441??ADI???????????????MEMS?????????????????????????????????????С?λ?????????

MEMS???????????????????

????Yole Développement??????MEMS???????????????MEMS???????2015?????????г?????????????????????????????(2009-2015)??????????г???????2009???790?????????????2015???6.44??????????????????????????MEMS???????????????????????????MEMS???????г????MEMS?????????У?VTI???????????MEMS?????????????VTI?????3D MEMS??????????????Ч??С?????Ч???

????VTI???????о???????Discera?????????????Ч???MEMS???????з???????????????????硢???????????????????á?Discera?????????????????????????????????????????????????????????????????Ч?????????????????????????ù??????????MEMS????????????DSC11XX???????????????????????????????????????Χ?????????????????????????????????????????SAW?????????????????????????????????????????з???????10ppm????????DSC11XX????????????Э????DisplayPort??Ethernet??Fibre Channel??PON??SAS??WiGig?????????10Gbps?????Ч??????

?????????MEMS??????????λ??SiTime??????????????????? ?????????????????????????????????????????????????????SiT8503?????(kHz)???????MEMS??????????????????????????????MEMS???(megahertz????MHz)???????????one-stop-shop???????????????????????ù?????????????????????????????????????????????????????????SiT9105??3-PLL??5?????????SiT9105????????MEMS???????????????????LVCMOS??????????????????????????????????С???66% ??????????·???????SiTime??SiT9105??????·?????????????????????????????????м????????????????豸??

SiTime????????Piyush Sevalia???????"????????????????SiTime???????ù輼????????????????????????"???????????????????????SiT9105?????????????????ü????????????г???????????????????????????ɡ???????Щ???????????о????SiT9105?????????????????????·??????С?????????????????????????????????SiTim??????????????????????????????????????????????????????????????