?????Howard Wisniowski

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??????????????????MEMS???????????????????????????????????硢???????д????????????“????”??????MEMS????????????г??????????????л???????????????????????MEMS???????????????????????????????????????????????Щ??????????÷??????????????????????????????“????”?????????и??????????????е?????MEMS???????????????????????????????MEMS?г???á??????????????????????????????????о????????MEMS????????????????????????????????????????????????????

“MEMS???????????”Yole Development????????????“????MEMS???????y???????????”???????о???50????????????????MEMS???????????Щ????????????????????????????????????3??????“?????”???μ?MEMS???????????????MEMS???????RF MEMS?????г????MEMS??????

????????BAW?????MEMS??????

????IHS iSuppli??????????????????????????2011??MEMS???????г??????6.55??????????2010???3.94???????????66%?????????????????MEMS?г???????????????????????MEMS?????????????????????????????????豸???????????????MEMS???????????????????????г????????С?????????????

Qualtré?????λ???????????????????????MEMS???????——MEMS??????????????????????????μ?BAW????????????????MEMS?????????????е???????????????????????С?????????á???????????????????????CMOS??????ɡ????е?MEMS?????????????????????????5~50kHz????????????????BAW MEMS???????????????????????????????????Χ??1~10MHz???????BAW?????????????????????????????????????е???????У???????????????????????г??????????????????MEMS?????????????????????????У????????????????????????????????BAW MEMS????????и??????????????

?1 Qualtré??BAW MEMS??????

??BAW?????????????????Qualtré??е?HARPSS?????High Aspect-Ratio Combined Poly and Single-Crystal Silicon??????BAW MEMS????????????????????????????????????????????????????????????????????????Χ???????????????????????????????????????????????????г??????

RF MEMS?????г??

????????iPhone 4??????????“???????”??——?????????????2????λ???????????????????軹???????????ж????????????????????????????????????????????μ????????????????????????RF MEMS???????

RF MEMS????????壬??????????????????????????е?????????о?????RF MEMS????????????г???????????????????????????????????RF MEMS?????????????????μ?г???????綽??????????????????????????????????????IHS iSuppli?????2015??RF MEMS???г????????1.5???????

WiSpry?????λ??????????????????????MEMS???????——??????????RF MEMS?????г??????????????????????????????????????????????????????????????GSM??3G??CDMA??W-CDMA??LTE????????WiFi??????????FM??TV??????????????????????·???????????????????????????????????????4G LTE???——????Χ??700MHz??3700MHz????????????????????????????3GPP??????????????г???43???????????????????????LTE“??????”????——??ν???????????????????????????????????γ???????????????????4G?????????????

?2 WiSpry??RF MEMS?????г??

WiSpry??RF MEMS?????г??????????????з??????????????????????????????????????????????С????RF MEMS?????г????????????????????????б????????????????????????????????????????????????????????????????“????綽”?????????????????????????“?????”??????????лMEMS???????????豸??????????Ч?????????????????綽????????????????????

MEMS????

MEMS????????????????С??????????????????????????????е?????????????????顢??????????????????????MEMS??????????????豸?а???????????????????????????????????????????????????????????????????????????????MEMS???????????????????MEMS??????С??????????????????MEMS???о?????/?????????????о????????????????????·?塣

Sand 9?????λ????????????????????MEMS???????——???????????MEMS???о??????ù????MEMS??????????????λ??????????????????????????????????????????????????????????“????豸??????????????????”??????????????????????????豸??????????GPS????綽??Sand 9??????????MEMS?????????????????????????????λ???????????????????????????????????????spurious-free?????????????????????????????Ч???????綽?????????????MEMS????????????????????????????????????3G??4G??GPS????????????????????Sand 9???????????????????????????“???”?????????豸?????????????????????????????У?????????????????????????????????TCXO????????

?3 Sand 9??MEMS????о?

??????????Sand 9???????????MEMS?????????????????????????Ч?????????????е?????????????????Ч??????100??????????ζ????????и???????????С???硢??????????????????=?????????????Щ????????????????????????????????????????????????????????????????

??????????????????MEMS?????г???????????Σ???????63???????????г?????????1%?????MEMS?????????????????????????????г?????????2010?????MEMS???????г?????2140???????????2014????3.12????????????????????????y?????????г???“?????”MEMS?????????????MEMS?????????????????MEMS????????