?г??о?????Yole Developpement?????±????????????MEMS???????????δ??????????????????????????????????????????????????????MEMS?豸????????2012??2018????7%????????????

???????????MEMS???豸??????г???Yole Developpement??? MEMS????????豸?г???????????????????5.2%????????????2012???3.78?????????2018??????5.1????????????????????Yole Developpement???MEMS???豸?г????????????????????IC?豸?г?????

?????????????MEMS??????????????????????10.5%??????????????2012???1.36??????????2018???2.48??????????

???MEMS?豸?????????

????MEMS?????????????????????????????Yole Developpement???????“?????????????”???????MEMS??????????IC???????????似??????????????????????????????????????????????MEMS?????????????????????????????????????????磬CMOS MEMS???????????????????????в?????MEMS???磩??

???????MEMS??????????????????????г???????????????κ??????????????????????????????????MEMS????????????????????????????????Yole Developpement?????????????????????????????????????????????????????????MEMS??????????????????????????????磬??????????MEMS??????????????????

MEMS??????????????

Yole Developpement??????У???????MEMS??????????????????????????????????????б?????????????????????韁?????????MEMS?????????????????????????Σ?????????????????????????μ?MEMS????????

??????????????????????????MEMS???????????????????????????????????????????о???????????????????????????????????????????????????IDM??????????????????????????MEMS??????????????????ST??THELMA??????????????????MEMS??????????????????????????????????????????

MEMS???????????????

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Yole Developpement?????е?MEMS???????г??????????δ????????????????????????????????????????PZT???????????Cavity SOI??CMOS MEMS????????MEMS ??????????????????????????????Со????????????????????????????