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δ??????MEMS??????????????μ????????????
2013-07-12 13:21:44   ????????   ?????0   ?????

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????????鷲?Yole Developpement??????????MEMS???????????λ????????2012???MEMS??????????10??????????????????10????????70??????????????????????????????棬???1????????????????μ???20??30????????????????????????????????????????50????????????????Я????豸??????????????????????????MEMS????÷?Χ????????????

??“Accelerometer”??????????????????????????????1???????????????????M4A.001?????????????????????????????????????????????????г???????????????????SOC??system on a chip??????????С????????????????????????????????????????0.1???/?????????????????????????????????0.02???/???????????????1???????

??????????м?????????????????????????????????????????????4mm×4mm×1mm????????????????С??磬???1??????TSV???????????С??????о?????????????????????????????SOC???????????????????KGD??known good die??????????????????????????????????????????????SOC?????????????-?????????????????????????????????????????

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