???????????????ú???????????????????????????????????????????????ò???????з????????????????У??????????????????????????????????????????????????????????????????????????

??????????????????????滮“TSensors Roadmap”?????????δ??10??????????????????10??????????????????????????????TSensors Summit?????????Janusz Bryzek?????Щ??????????????2023??????????1?????????????????????????????????????????????????滮??????????????????????????С?

?????滮?У?????Bryzek???????????????????????е??????ж????????“TApp”????漲????????????????????????2014??2?￡?????????10??TApp??????Bryzek????????????????????TApp????????TApp?????????????????????С????????С???????????????????????????е??

2014???????????????????滮???滯????2015??6???????ж??????????????????????顣?????TSensors Summit?????????????????????????д????????????????????????????????????????????????????′????????λ??????????????????????????????????????

??????????軹??13????????

??TApp?漲????????????????????????????????????????????????????????????

??????棬Bryzek??????????г????????????????????????????“??????????????????????GDP????0.1%”??Bryzek??????????????2023??????GDP?130?????????????????????????????????13?????????Bryzek???????????ù??????????????????·????????????????????????????????1???????????????????????κ??????

?????????????????????????????????????????????????????????Bryzek?????“???????????????ζ????????????”???????????????滮?С?

????????

????????????????????????????????????????????????“?????????????й蹤???????????????”??????????????????????????????????????У???????????MEMS????????е???????????о?????????Albert A. Pisano??Professor and Dean, Jacobs School of Engineering????

??????????????????????????????????????????????“?????????а?????????????????1??????????????????????????????????”???????????????????????????

???????????????????У?Bryzek???????????????????????????????1???????????????а???????????????????????????????????1???

?1 ?????·?????????????????3D??????????????????????????????

??????TSensors Summit??????????????滮??????????????????????“TSensors Summit”??2013??10?￡????????????????????ù???????BP????2014??2?????????“Trillion Sensors Summit Japan 2014”???????У??????Щ?????????????

???????????????С??IC

????????MEMS?????????????????????????Со???????????????????????????????3??????????????о??????2mm²???????绹??????????С?????????????????????????????????????????????????????Ч???????????ó????????

??2013??10????е?TSensors Summit????????Terepac????????????????С?????о?????????2????

?2 ???0.5mm²???μ??Со??????Ч??

?????????????????????Terepac?????????????ù?о???????????????Χ??·???????????????????????????????????????????????????????????????

?ù????????????????????????????????????о?????0.5mm²????????50μm???о??????????????“???????е????????e???????????”??

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??????????“10?????????”

???????????????????У??Pisano????????????Bryzek???????????????Pisano??Bryzek????????????????????????????????????????????????????????о??????Pisano?????????????????????????????10?????????

Pisano??2013??10????е?TSensors Summit??2014??2??????????е?Trillion Sensors Summit Japan 2014????????????“Advective Nanoprint”????????????????3????????????е???????????????????????????????????????

?3 ???????????????????

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Advective Nanoprint???????γ????????????·??????????????????????????·?н????ī??????????ī??????????????塣????????????????PMP????????????????????????????????????????????PMP?????????????????????????????????????????????塣

??ε???????ī?????????·?У????????????γ???????λ?á????????????????ī?γ???????????????????????

?ü?????????????/????250nm?????????180nm??????????130nm?????λ?????25nm?????????????й????????“????2??????????????????????????”??Pisano????

??ī??????????????????????????????????????????????????????????ī?????????????????п????????????????????ī???????????????PMMA????ZnO???????????ī?????????????????2????ī??????????????γ?3??4??????

3D???????????

????滮????м????Ψ???????????“??????????3D???”??Bryzek?????????????????????????????г???TApp?????????“IoE”??“??????????????”??“?????????????????”??

Bryzek???????????????3D??????????????????????λ??????????????м?????1/1000??????????????IC????????????????????????????????÷????????????????????????????????????????С?

?1??????3?????????2013??10????е?TSensors Summit???????3D?????????????4????

?4 ?????????й???幤???γ??????????

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